以塗佈方式在玻璃基板上成長銅鋅錫硫薄膜之研究

目前製備銅鋅錫硫薄膜的方式有：電鍍沉積法、射頻磁控濺鍍法、噴霧熱解法、共蒸鍍法、光催化沉積法及雷射蒸鍍法。在這些方法中，噴灑熱解沉積法最為簡單且也是最能夠進行大面積化生產的方式。可是，由於沉積薄膜為四元化合物，因此薄膜中各元素比例相當不易控制。另一方面，噴灑熱解法必須在高溫的基板上噴灑各元素之混合溶液，為求薄膜的整體均勻性，必須以奈米等級的厚度一層接著一層成長，這將使薄膜的成長速率降低因而影響到產能。因此就產業界的觀點來看，噴灑式的沉積方式將無法滿足高產能的要求。對此，本論文提出以旋轉塗佈方式成長銅鋅錫硫薄膜。我們的做法如下：以氯化銅、氯化鋅、氯化錫、硫脲等水溶液在玻璃基板上塗佈，然後再以爐管方式成膜。此外，我們將針對水溶液中各結晶粉末不同的莫耳數來調製薄膜中的組成比例以形成最佳能隙銅鋅錫硫薄膜，做出的太陽能效率高達1.12%

關鍵字

太陽電池；銅鋅錫硫；旋轉塗佈法；快速熱退火法

並列摘要

There are several technologies including Electro-deposition technology, radio-frequency (RF) magnetron sputtering technology, spray pyrolysis method, co-evaporate technology, photo-chemical deposition method, and pulsed laser deposition (PLD) technology to fabricate CZTS thin film. Among these technologies, spray pyrolysis method attracts much attention due to the versatile, low cost and large area production. However, the composition of each element in CZTS thin film is difficult to control, which results the problem of reliability. In addition, in order to obtain a uniformed thin film on a heating substrate by spraying the aqueous solution, a slow deposition rate is needed. The low deposition rate brings the problem of low throughput for mass production. Based on this point of view, we proposed spin coating method to substitute spray pyrolysis technology in this proposal. We will fabricate the CZTS thin film, by versatile processes including using the different mole concentration of cupric chloride (CuCl2), zinc chloride (ZnCl2), tin chloride (SnCl2), thiourea aqueous solution to spin on the glass substrate and then heating by the furnace or rapid thermal annealing system to film growth. The optimum aqueous solution for CZTS thin film deposition will be investigated by the crystalline structure and optical characteristics.

並列關鍵字

solar cells ； copper zinc tin sulfide ； spin coating ； rapid thermal annealing

參考文獻

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國際替代計量

以塗佈方式在玻璃基板上成長銅鋅錫硫薄膜之研究

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