電潤濕於微透鏡陣列的製作

Fabrication of Microlens Array with Electrowetting

張義偉(Yi-Wei Chang)

指導教授 ： 黃俊德

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2009年)

摘要

微透鏡是一種將光線聚合或分散的設備，廣泛的應用於日常生活當中，例如：LCD背光模組、平面投影機系統、新型DVD讀寫頭等相關應用。微透鏡既有的傳統精密機械加工技術、熱熔回流製程、蝕刻製程、電子束微影等方法，因加工過程耗時、參數控制不易、設備成本昂貴。因此需要一種快速、簡單且便宜的方法來製造微透鏡。電潤濕現象是利用外加電位差來減少固體與液體的介面能量，改變液滴於固體表面的潤濕特性，藉此來增進固體表面與液體間的潤濕行為。本研究是以電潤溼法搭配LIGA製程，探討不同電壓差其微透鏡控制之曲率變化。

藉由實驗證實藉由調整液滴狀導電UV感光劑與試片之間的電壓，隨電壓增加電潤濕效應也隨之增加，液滴曲率隨之減小，達到控制微透鏡外型的目的。藉由導入不同程度的電潤濕效應得到所需之外型後，固化導電UV感光劑，固化後之液滴即可做為微透鏡或微透鏡模仁之應用，實驗中也成功的製作出微透鏡陣列模仁，並透過熱整型實驗來改善微透鏡表面狀態。

關鍵字

電潤濕 ； 微透鏡陣列UV感光劑 ； 微透鏡曲率

並列摘要

Electrowetting on dielectric (EWOD) allows the controlled change of the contact angle of a liquid droplet by applying a voltage between liquid droplet and an electrode. By applying a voltage between the droplet and the electrode, an electric field is generated which leads to an additional surface energy term in the system, and thereby effectively reducing the interfacial energy between the liquid and the substrate. In this thesis, an electrowetting fabrication technique for the production of microlens, which hybrids the EWOD and lithography electroforming micro molding (LIGA) process, is proposed, through controlling the microlens curvature by different voltage. The unique capability of controlling the microlens curvature during the electrowetting fabrication processes is successfully demonstrated on the electrically conductive UV-curable polymer. The control of the microlens profile is achieved by adjusting the voltage across a hydrophobic dielectric layer sandwiched between an electrically conductive UV-curable polymer and an electrically conductive substrate, and thereby introducing different degrees of the electrowetting phenomenon. For a microlens fabricated is found that when the applied voltage is increased, the curvature decreases and achieve produced microlens array mandrel success in this thesis.

並列關鍵字

Electrowetting ； microlens array ； UV-curable polymer ； microlens curvature

參考文獻

【1】 D. Cahan, Hermann von helmholtz and the Foundations of Nineteenth- Century Science, California University, 1994.

【2】 J. W. Gibbs, H. A. Bumstead, W. R. Longley, R. G. V. Name., The Collected Words of J. W. Gibbs, Longmans, Green and Co, 1928.

【3】 P. C. Hiemenz, R. Rajagopalan, Principles of Colloid and Surface Chemistry, Baker and Taylor Books, 1997.

【4】 G. Peacock, T. Young, Miscellaneous Works, Ed., Murray, Vol. 1, pp. 418, 1855.

【5】 D. C. Grahame, “The Electrical Double Layer and the Theory of Electrocapillarity ,” Chem. Rev., Vol. 41, pp.441-501, 1947.