- 學位論文
具有奈米結構氧化物半導體/有機半導體元件特性及應用
Study of Oxide/Organic Semiconductor Devices with Nanostructure
摘要
本文主軸為奈米結構、氧化物及有機半導體元件的特性探討，提出具有超高載子遷移率非晶銦鎵氧化鋅電晶體、可圖型化銀奈米線電極，最後測試康寧材料高靈敏性高電流氨氣感測器。 論文主要分三個部分，首先引入銀奈米線，著重提升銦鎵氧化鋅電晶體的載子遷移率，並利用元素分析探討元件特性的機制。銀奈米線的加入，增加電子從源極到汲極的傳輸進而促使場效載子遷移率大幅提升，透過元素分析發現，銦元素擴散與銀奈米線形成銦銀氧化物，電子能輕易藉由金屬傳導。銦鎵氧化鋅薄膜扮演的角色不僅是傳輸層，同時保護銀奈米線不受後退火而影響金屬導電性。在沒有封裝的條件下，元件載子遷移率能維持約10倍左右的提升、具有出色的可靠度，也沒有發現磁滯現象，儲存於空氣環境下元件壽命維持超過93天。 接著利用深紫外光來直寫圖型化銦氧化鋅薄膜，搭配銀奈米線，進而製作具有前瞻性的透明電極，研究中我們也成功移除銦元素，製作出銀奈米線氧化鋅透明電極，此電極也成功的製作在合作團隊楊教授提供的柔性基板，經過彎曲測試後，依然能保有高導電的特性，我們同時將此電極結果應用於光感測器上。 最後，我們測試由合作公司賀博士提供的有機半導體材料，用此材料於過去實驗室成熟的氣體感測器，此材料本身具有高載子遷移率、能均勻溶於無毒性的溶劑且有良好的空氣穩定性。 我們以此元件與過去實驗室最好的氨氣感測器材料相互比較，感測能力及穩定度上非常相似，但康寧材料提供了更高的電流特性，未來康寧材料將很有潛力用於氣體感測器並能應用於商業上。
並列摘要
In this thesis, the spindle is surrounded by a combination of nanostructures and oxide semiconductor devices. We provide an amorphous indium gallium zinc oxide transistor with ultrahigh carrier mobility and a patternable silver electrode. In the final of this thesis, we preliminary test Corning materials that have high sensitivity, high current ammonia gas sensor and can be dissolved in a non-toxic solvent. This thesis is divided into three main parts. First of all, we introduce the silver focus on improving the carrier mobility of indium gallium zinc oxide transistor. We use elemental analysis to investigate the mechanism of device characteristic. The silver accelerates the transfer of electrons from source to drain leading to a 12 times increase in field-effect carrier mobility. The unchanged morphology of the conductive AgOx nanowires and the good contact between IGZO and nanowires are critical to achieving high effective field-effect mobility. The role of indium gallium zinc oxide film not only serves as the transport layer but also protects silver to maintain have high conductivity after post-annealing. The formation of robust conductive nanowire system in AgOxNW a-IGZO TFTs, giving rise to excellent device reliability with no hysteresis and a lifetime of over 93 days. Next, we use deep ultraviolet light to directly pattern indium zinc oxide thin film with silver and then make a forward-looking transparent electrode. It is noted that the capping material is not limited to IZO, DUV-patterned ZnO-capped silver is also successfully demonstrated to exhibit good enough transparency and conductivity. Professor Yang provides a PI flexible substrate that we also demonstrate the IZO-capped silver electrode on PI substrate then the result demonstrates on photovoltaic applications. Finally, we initially test the organic semiconductor materials provided by Cooperation Company and used in previous laboratory gas sensors. The materials can be dissolved in a non-toxic solvent to produce a uniformly thin semiconducting layer, have high mobility and highly stable shelf life without the need of an encapsulating layer. We compare the device response, lifetime and current level with our lab previous result of TFB. Both the device to detect ammonia sensing that the response and lifetime are similarly. It is noteworthy that Corning materials serve a high current. In a commercial application, Corning materials have an advantage.
參考文獻
延伸閱讀
- Chou, C. H. (2009). 二六族半導體奈米材料之製備與其在有機光電元件之應用 [doctoral dissertation, National Chiao Tung University]. Airiti Library. https://doi.org/10.6842/NCTU.2009.01051
- Pan, H. J. (2012). 半導體奈米材料之合成與特性分析及其應用 [master's thesis, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2012.10816
- 游政衛（2012）。氧化鎵/氮化鎵奈米線金氧半場效電晶體之製作與特性研究〔博士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2012.10135
- Nguyen, H. P. T., Arafin, S., Piao, J., & Cuong, T. V. (2016). Nanostructured Optoelectronics: Materials and Devices. Journal of Nanomaterials, 2016(), 372-373-037. https://doi.org/10.1155/2016/2051908
- Zheng, W. (2002). Dynamic conductance of nanostructures [doctoral dissertation, The University of Hong Kong]. Airiti Library. https://www.airitilibrary.com/Article/Detail?DocID=U0029-1812201200008229