金薄膜上成長氧化鋅陣列之結構與形貌分析

本研究利用兩個步驟成長氧化鋅奈米線，首先在單晶矽晶圓(100)上直流濺鍍一層約10奈米的金非連續薄膜，作為成長氧化鋅奈米線的晶種(seed)，接著以水浴法(Hydrothermal)成長氧化鋅奈米線陣列。所有過程中的製程溫度不超過95℃，第二步驟的反應溶液使用六水合硝酸鋅(Zn(NO3)2·6H2O)及六亞甲基四胺(C6H12N4)。此研究主要是探討以金非連續薄膜為晶種，本實驗也從改變化學溶液的濃度及使用氧化鋅薄膜作為成核層，對於氧化鋅奈米線成長的影響，觀察所成長出的氧化鋅奈米線之直徑、長度和分布密度的變化，並討論成核層與氧化鋅奈米線之間的相互關係。利用掃描式電子顯微鏡(SEM)觀察金薄膜與氧化鋅奈米線的表面形貌，微結構則是利用X光繞射(XRD)和電子背向散射繞射分析(EBSD)來觀測巨觀及微觀的晶體結構。此外，我們利用X射線光電子能譜儀(XPS)以及電子能量損失譜儀(EDS)進行元素成分分析。研究結果顯示，非連續金膜為晶種，成長出之氧化鋅奈米線比使用氧化鋅薄膜密度較稀疏，而反應溶液的濃度則會影響奈米線的直徑大小。在結晶性及筆直度的部分，發現利用金薄膜成長的奈米線有較好的結晶方向(002)，且奈米線的準直性也較高。最後將有壓電特性的氧化鋅奈米線使用導電原子力顯微鏡(C-AFM)系統，以Pt探針為電極接觸掃描的方式進行測量。結果顯示單根氧化鋅奈米線彎曲時可以產生500pA以上的電流輸出。

關鍵字

氧化鋅陣列；形貌分析；成長密度；金晶種

並列摘要

ZnO nanowire arrays are grown by two steps. Firstly, a gold layer of 10 nm thickness was deposited on the silicon wafer by DC sputtering to function as nucleation sites. The layer feature depends on the deposition thickness. Then, the hydrothermal deposition was applied to grow the wire array. The Zn(NO3)2·6H2O and C6H12N4 were the chemical reagents used in the second step of the reaction. All operational temperatures were below 95oC. The effect of the Au nucleation behaviors on the grown wire arrays is investigated by examining the feature, diameter, length, and density distribution of the nanowires. The solution concentration, grown temperature, time, and immersing time before hydrothermal process were found to have influence on the perpendicularity of the wires. The morphologies of the wire feature were observed by SEM and the microstructure and crystallography were evaluated by XRD , TEM and EBSD. It is observed that the wire density increases with Au layer thickness, the solution concentration affects the wire diameter, and the perpendicularity of the grown wire depends on the immersion time before the grown process. The XRD diffraction analysis shows that the well-aligned single crystal of ZnO nanowire arrays growing on Au layer is in (002) preferred crystallographic orientation. the piezoelectric property impries the ZnO nanowires have potential for the application of nanogenerator.

並列關鍵字

ZnO nanowire array ； Au nucleation site ； morphology ； grown area density

參考文獻

〔1〕Iijima.S,“Helical microtubules of graphitic carbon.”,Nature,Vol.354,pp.56-58,1991

Google Scholar

〔2〕Tian.Z.R,et al. “Biomimetic arrays of oriented helical ZnO nanorods and columns.”,Journal of American Chemical Society,Vol.124,No.44,pp.12954-12955,2002

Google Scholar

〔3〕Boyle.D.S,et al. “Novel low temperature solution deposition of perpendicularly orientated roods of ZnO : substrate effects and evidence of the important of counter-ion in the control of crystallite growth.”,Chemical Communication,Vol.1,pp.80-81,2002

Google Scholar

〔4〕Yang.X,et al.“Preparation and characterization of ZnO nanofibers by using electrospun PVA/zinc acetate composite fiber as precursor.”,Inorganic Chemistry Communications,Vol.7,Issue.2,pp.176-178,2004

Google Scholar

〔5〕Zhong Lin Wang,et al.“Piezoelectric Nanogenerators based on zinc oxides nanowires arrays.”,Science,Vol.312 ,No.5771,pp.242-246,2006

Google Scholar

國際替代計量

金薄膜上成長氧化鋅陣列之結構與形貌分析

全文下載

主題瀏覽