開發差分法石英晶體微量天秤原位偵測化學反應

Development of Differential Quartz Crystal Microbalance for in-situ Detection of Chemical Reactions

陳威菘(Wei-Sung Chen)

指導教授 ： 呂志鵬

國立交通大學/工學院/奈米科技研究所/碩士(2018年)

摘要

石英晶體震盪器是一個眾所皆知可以用在量測薄膜成長並監控重量沉積的儀器。在薄膜沉積方面，因為石英晶體震盪器接近原子尺度高精準度，使其被廣泛的運用在探測表面的反應上。
在半導體製程中，我們需要了解一個薄膜材料在原位熱解的過程中，此材料受熱分解的特性；依此看來，石英晶體震盪器似乎為我們提供了一個很好的解決方案藉此了解薄膜的特性。石英晶體震盪器中的石英晶體在室溫或是接近室溫下，其震盪頻率不容易受到溫度的影響；不幸的是，石英晶體有一個致命性的缺點，就是在較高的溫度時，高溫環境會對石英晶體造成非常大的震動不穩定性，以至於影響測量的精準度。
在本研究中，我們採用原位差異性的方法來操作石英晶體震盪器，並使用旋轉塗佈機來沉積奈米群集二氧化矽多孔性低介電薄膜以及聚甲基丙烯酸甲酯薄膜，分別藉由其熱解反應及縮和反應來印證我們的方法。具體來說，我們使用快速退火爐系統以同樣的升溫過程加熱同一片石英震盪片兩次。第一次的升溫過程我們以空白的石英震盪片加熱至接近攝氏300度，待其降溫後，我們利用同一片震盪片鍍上我們的薄膜材料，再以相同的升溫過程加熱第二次。為了測量材料的反應，我們利用差異性的分析方法來分析兩次的數據，並把所得的結果和熱重分析儀做比較。藉由這種差異性石英晶體震盪器的方法，我們成功的量測到所探討材料的熱解反應及縮和反應。

關鍵字

石英晶體震盪器 ； 聚甲基丙烯酸甲酯 ； 熱解反應 ； 縮和反應 ； 奈米群集二氧化矽多孔性低介電薄膜 ； 快速退火爐 ； 熱重分析儀 ； 紫外光

並列摘要

The quartz crystal microbalance (QCM) is a well-known equipment for monitoring mass deposition on thin film growth. For thin film deposition, the QCM is widely used at probing the surface reaction because of its atomic level resolution.
In semiconductor process, we need to know the in situ thin film characteristic when the thin film decomposition. It seems that QCM provide us a good chance to analysis the thin film properties. The crystal of QCM has a very low temperature dependence on resonance frequency at room or near room temperature. Unfortunately, there is a fatal disadvantage that the temperature causes very large instability on resonator frequency at higher temperature and therefore affect the precision of measurement.
In this study, we adopt in situ differential approach to operate the QCM. We characterized decomposition reaction and condensation reaction by using spin-on nano-clustering silica (NCS) and poly methyl methacrylate (PMMA) thin film respectively. In specific, we use one quartz which go through the same ramping recipe two times in Rapid Thermal Process (RTP) system. First time, we ramp up the blank quartz closes to 400 degrees Celsius, and the second time is deposited quartz with the same recipe. In order to understand the effect of Ultraviolet (UV) on the thermal degradation of PMMA film, we have added post treatment UV data to achieve this purpose.
To detect the reaction, we use differential method to analysis two data and compare to thermogravimetric analysis (TGA) equipment results. With the model, decomposition and condensation reaction can be detected.

並列關鍵字

Quartz Crystal Microbalance ； Thermogravimetric analysis ； poly methyl methacrylate ； nano-clustering silica ； rapid thermal annealing ； decomposition reaction ； condensation reaction ； Ultraviolet

參考文獻

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