矽化鈷薄膜之製作與電性傳輸研究

Fabrication and Electrical Transport of Cobalt Silicide Thin Films on Silicon

陳仕偉(Shyh-Wei Chen)

指導教授 ： 林志忠

國立交通大學/理學院/物理研究所/碩士(2019年)

摘要

無資料

關鍵字

矽化鈷 ； 薄膜 ； 電性傳輸 ； X光繞射圖譜 ； 半金屬

並列摘要

無資料

並列關鍵字

Cobalt Silicide ； CoSi ； Electrical transport ； X-ray diffraction ； RT ； Semimetal

參考文獻

[1] M. Longhin, R. Viennois, D. Ravot, J. J. Robin, P. Papet, Nanostructuration of CoSi by mechanical milling and mechanical alloying, Solid State Sci. 38, 129 (2014).

[2] X. Xu, X. Wang, T. A. Cochran, D. S. Sanchez, I. Belopolski, G. Wang, Y. Liu, H. J. Tien, X. Gui, W. Xie, M. Z. Hasan, T. R. Chang, S. Jia, Crystal growth and quantum oscillations in the topological chiral semimetal CoSi, Phys. Rev. B, 100, 045104 (2019).

[3] S. P. Chiu, S. S. Yeh, C. J. Chiou, Y. C. Chou, J. J. Lin, C.C Tsuei, Ultralow 1/f Noise in a Heterostructure of Superconducting Epitaxial Cobalt Disilicide Thin Film on Silicon, ACS Nano, 11, 516 (2017).

[4] X. Yuan, X. X. Hu, X. L. Ding, H. C. Kong, H. D. Sha, H. Lin, W. Wen, G. Shen, Z. Guo, Z. F. Ma and Y. Yang, Effects of cobalt precursor on pyrolyzed carbon-supported cobalt-polypyrrole as electrocatalyst toward oxygen reduction reaction, Nanoscale Res. Lett., 8, 478 (2013).

[5] L. Zhang, X. Chen, S. Jin, X. Di, C. T. Williams, Z. Peng, C. Liang, Highly selective hydrogenation of phthalic anhydride to phthalide over CoSix/CNTs catalyst prepared by multi-step microwave-assisted chemical vapor deposition, Mater. Chem. Phys., 180, 89 (2016).