A double and triple chambers low-compression ratio peristaltic micropump is presented in this thesis. The compression ratio is almost 0.00706. We calculate the net flow rate of micropump with different peristaltic motion and different back pressures. Furthermore, the flow of micropump is also analyzed by using lump system. The unsteady model is capable of predicting the pressure and flow rate of micropump inside. By the simulation result, the peristaltic motion of reverse three-phase achieved a maximum flow rate. Besides, the micropump can sustain maximum backpressure when increase the chambers of micropump.