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  • 學位論文

以瓶頸機台負荷評估晶圓廠投料決策

A Wafer Start Policy By Loading Of Bottleneck Machine For Semiconductor Fabrication

指導教授 : 巫木誠

摘要


本論文以半導體晶圓製造廠為對象,針對同時存在訂單式生產與庫存式生產模式的日投料決策進行研究,此決策目的主要在使瓶頸機台的每日在製品需求變異最小化,以降低產品生產週期時間的變異。本研究發展出四種投料方法(M-1、M-2、M-3、M-4)後,以Flexsim模擬軟體建立模型進行實驗,並利用ANOVA對模擬結果進行分析。其分析結果指出M-1投料方法明顯優於其他三種投料方法。

並列摘要


This research studies the daily job release policy for a semiconductor wafer fab, operating in a scenario which involves both MTO (make-to-order) and MTS (make-to-stock) orders. The objective of the job release policy is to minimize the work-in-process (WIP) deviation of the bottleneck workstation, in order to reduce the deviation of cycle time. Four heuristic methods (M-1, M-2, M-3, and M-4) are developed in this study and justified by a simulation program coded in Flexsim (proprietary discrete event simulation software). Simulation results indicate that method M-1, by the ANOVA test, significantly outperforms the other three ones.

參考文獻


Geng, N. and Jiang, Z. (2009). “A review on strategic capacity planning for the semiconductor manufacturing industry,” International journal of production research, Vol. 47, No. 13, pp3639-3655.
Glassey, C. R. and Resende, M. G. C. (1998). ”Closed-Loop Job Release Control for VLSI Circuit Manufacturing,“ IEEE Transactions on Semiconductor Manufacturing, Vol.1, No. 1.,pp.36-46.
Kim, Y. D. (1998). “A simulation study on lot release control, mask scheduling, and batch scheduling in semiconductor wafer fabrication facilities,” Journal of manufacturing systems, Vol.17, No.2, pp102-117.
Kuhl, M. E. and Laubisch, G. R. (2004). “A Simulation Study of Dispatching Rules and Rework Strategies in Semiconductor Manufacturing,” IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp325-329.
Melnyk, S. A. and Ragatz, G. L.(1989) Order review/ release: research issues and perspectives. International Journal of Production Research, Vol.27, No.7, pp.1081-1096.

被引用紀錄


梁日徽(2014)。MTS/MTO晶圓廠日投料與派工決策〔碩士論文,國立交通大學〕。華藝線上圖書館。https://doi.org/10.6842/NCTU.2014.00207

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