離子源製作與離子光學模擬

離子源(Ion Source)是加速器(Accelerator)的核心，透過離子源將氣體電離產生電漿，並以高電壓將其引出形成離子束，之後應用在各種領域中。為此我們架設一個測試離子源的實驗站，包含離子源系統、引出系統、聚焦系統。離子源引出的離子束經過加速後打入法拉第杯，以電流的數據記錄下來。主要針對兩部分收集數據：在不同的引出電壓下，被引出的離子束電流是否與空間電荷限制流吻合。另外在聚焦電極(Einzel lens)作用之下，離子束電流是否會大幅提升。最後搭配離子光學模擬程式，將模擬和實驗的數據對照與分析。

關鍵字

離子源；離子光學模擬；聚焦電極

並列摘要

The Ion source is the heart of Accelerator instrument which can convert the gas to the plasma. With high voltage, ion beam is extracted from the plasma and applied to various fields. To test ion source, we set up an experimental station, which includes ion source system, extract system and focus system. During the experiment, ion beam is accelerated by high voltage and collected by the faraday cup, which absorb and show how many current ion beam have. The measured data showed the two major information, the first is whether the current verify space charge limited charge (SPCLC) on different extractor voltage. Second is whether the current increases on focusing voltage. Finally we compare it with ion beam simulation data, and analyze the result.