利用飛秒雷射製備液晶配向層及標準氣漏元件之微孔洞

Fabrication of Liquid Crystal Alignment Layer and Micro Holes in Standard Leak Element by Femtosecond Laser

涂志遠(Zhi-Yuan Tu)

指導教授 ： 羅志偉

國立交通大學/理學院/電子物理系所/碩士(2020年)

摘要

本論文利用鈦藍寶石飛秒等級脈衝雷射，於透明導電薄膜上製造週期性奈米結構，及在金屬片上鑽微米等級孔洞，相較於連續波雷射及脈衝寬大於皮秒之脈衝雷射，飛秒等級脈衝雷射具有更低的熱效應及更大的非線性效應。
此奈米結構之透明導電層可使液晶分子排列配向，無須再多製造一層配向膜。另外，我們發現此週期性結構在可見光波段有偏振選擇性，具有進一步取代傳統面板偏振片之潛力。
本論文第二部分是利用不同偏振之脈衝雷射光於標準氣漏元件上鑽出微米等級的通孔，且與同步輻射中心真空小組合作，由他們量測氣導，此元件可應用於真空測漏儀、氣體分析儀、氣體流量控制等。

關鍵字

飛秒雷射退火 ； 飛秒雷射鑽孔 ； 液晶配向層 ； 標準氣漏元件

並列摘要

In this thesis, I used Ti:Sapphire femtosecond laser pulse to fabricate periodical micro-structure and drill microvias on the metals. Compared to long laser pulse ( > picosecond) and continuous wave (CW) laser, femtosecond laser pulse has the lower heat effect and larger nonlinear effect.
The liquid crystal molecules can be aligned on the transparent conducting layer with a periodical micro-structure, which was fabricated by femtosecond laser pulses. Additionally, the femtosecond laser-annealed transparent conducting layers also can polarize the transmission light. Besides to be the alignment layers, it has a potential to replace the polarization layers in the conventional liquid-crystal display (LCD) panels.
For the second part in this thesis, I utilized the femtosecond laser pulses with different polarization states to drill microvias on the metallic thin plates. We also cooperated with the vacuum team in NSRRC to fabricate standard leak element which can be applied to the leak gas detectors, gas analyzers, and gas flow controllers, etc.

並列關鍵字

Femtosecond laser annealing ； Femtosecond laser drilling ； Alignment layer ； Standard leak element

參考文獻

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[5] D. K. Yang, and S. T. Wu, Fundamentals of liquid crystal devices, 2nd ed, (John Wiley & Sons, 2014), pp. 154.