新興材料危害評估方法之研究 以薄膜太陽能製程二乙基鋅為例

Investigation of New Materials Risk Assessment–Case Study of Thin Film Solar Cell Diethyl Zinc Process

黎漢徳(Han-Te Li)

指導教授 ： 傅武雄

國立交通大學/工學院/工學院產業安全與防災學程/碩士(2012年)

https://doi.org/10.6842/NCTU.2012.00836

摘要

本論文之目的研討為薄膜太陽能電池透明導電氧化物製程，新興材料之二乙基鋅危害評估方法實務研究。
起因為國內薄膜太陽能電池技術，大量使用金屬有機化合物，而現行法規未列管且未具有完整危害預防資料，例如：危害辨識及風險評估的完整資訊，以致於在危害物管理及職業災害防止上形成漏洞，如何評估使用之新興材料危害，有效建立二乙基鋅危害預防技術，實為當務研究課題。
推動新興材料危害防制與應變技術策略規劃，針對使用新興材料及其化學品衍生之製程安全技術、系統建置、儲存輸送風險評估，展開新興產業安全評估與控制技術建置。
本研究首先針對太陽光電產業製程主要使用危害物質分類，與二乙基鋅特性、管理機制、供應系統風險評估及危害分析進行探討，並與國、內外法規管理規範比較，研析二乙基鋅製程安全風險評估納入管理規範建議
以薄膜太陽能電池透明導電氧化物MOCVD製程為風險評估對象，針對製程中使用大量金屬有機化合物，研擬風險控制對策，以降低金屬有機化合物操作使用與意外洩漏之潛在危害。
針對某薄膜太陽能電池廠之二乙基鋅(Diethyl Zinc)製程，供應系統端製程危害分析，作為製程安全最佳化設計之基礎，建立一套完善的製程安全管理系統。
本研究之製程安全評估方法，首先執行初步危害分析(PrHA)之現場危害查核表（Checklist），針對二乙基鋅(Diethyl Zinc)製程使用危害性物質的設備機台執行評估，進一步使用危害與可操作性分析(HazOp )安全評估方法，製作薄膜太陽能電池廠之二乙基鋅(Diethyl Zinc)供應系統風險評估表，以辨識出造成重大潛在危害事件發生之基本原因，並建立新興材料之二乙基鋅危害、控制改善建議。
依據二乙基鋅製程與儲存危害分析評估結果，研擬出適用於薄膜太陽能電池新興材料二乙基鋅風險控制方法。以建立相關應變、滅火與防救措施技術。

關鍵字

薄膜太陽能電池 ； 二乙基鋅

並列摘要

The aim of this article is to investigate the hazard assessment method for an emerging material, Diethyl Zinc, which is used in the transparent conductive oxide process for thin film solar cells.
The domestic thin film solar cell industry extensively uses metal-organic compounds. However, full hazard prevention information, such as complete information for hazard identification and risk assessment, are not listed in existing regulations, which results in a legal loophole of hazard management and occupational disaster prevention. Thus, it is an important research topic to investigate how to assess the hazards of the emerging materials and establish the prevention techniques for Diethyl Zinc.
Furthermore, the promotion of the hazard prevention and the strategy planning to deal with a contingency for emerging materials are also included. Focused on the risk assessment for the process safety techniques, system establishment, storage, and transportation of the emerging materials and their chemical derivatives, the emerging industry safety assessment and control technique establishment are developed.
This study first categorizes the main hazardous materials used in the manufacturing process of photovoltaic industry. In the following is the discussion of the characteristics, management mechanisms, risk assessment of the supply system, and hazard analysis. Comparing with domestic and foreign regulations and management practices, the process risk assessment of Diethyl Zinc is analyzed and recommended to be included in the management practices.
Taking the transparent conducting oxide MOCVD process in thin film solar cells as the subject for risk assessment, make supplement and modification of the material safety data sheets of metal-organic compounds. Focused on the lots of metal-organic compounds used for the process, develop the risk control strategy to reduce the potential hazards during operation or accident leakage of metal-organic compounds
The process hazards of Diethyl Zinc process in certain thin film solar cell company process flow and in the supply chain are analyzed to give a basis for
optimal design of process safety, and establish a comprehensive process safety management system.

The process safety assessment in this study first performs a Preliminary Hazard Analysis (PrHA). Assess the hazards of the equipments used in the Diethyl Zinc process. Furthermore, the Hazard and Operability Study (HazOp) safety assessment methods are used to produce the supply system risk assessment table of Diethyl Zinc for thin film solar cell companies to identify the root causes of the significant potential hazardous events. The hazard control and recommendations for improvement of the emerging material Diethyl Zinc are also assessed.

Based on the assessment results of the hazard analysis for the process or storage of Diethyl Zinc, develop a appropriate process safety risk assessment for emerging material Diethyl Zinc used in thin film solar cell industry. On the one hand, from the viewpoint of danger, establish related responses, fire fighting, and disaster relief measure techniques. On the other hand, from the viewpoint of hazard, establish health and toxicological information and exposure prevention techniques to reduce the risks and prevent accidents.

並列關鍵字

Thin Film Solar Cell ； Diethyl Zinc、DEZn、DEZ

參考文獻

〔14〕莊浩浰，「超低溫液體供應系統之製程危害辨識與後果分析」，勞工安全衛生研究季刊，第16卷第3期，第276-294頁，民國97年9月。

〔1〕趙學禮，「非晶矽太陽能電池之材料成長、元件製作及特性分析」，中央大學，碩士論文，民國96年6月。

〔3〕張振平、陳旺儀，「高科技行業金屬有機化合物危害調查-以磊晶製程為例」-勞委會勞工安全衛生研究所，民國99年2月。

〔4〕劉立文，「高科技行業使用新興材料職業衛生危害性調查研究」-勞委會勞工安全衛生研究所，民國98年3月。

〔6〕張承明，「四氫化矽的製造與儲存管理規範研究」-勞委會勞工安全衛生研究所，民國99年2月。