環形塗佈不穩定手指狀之研究

The annular coating of unstable fingers research

洪漢斌(Han-Bin Hong)

指導教授 ： 周復初

國立中央大學/工學院/機械工程學系/碩士(2006年)

摘要

傳統矽晶圓塗佈表層覆膜大多是以旋轉塗佈的方式為主，液體在旋轉塗佈的過程，因為離心力的作用，使得不穩定手指狀流會在連續薄膜波前處產生，本實驗採用不同於傳統矽晶圓塗佈實驗而是以環型塗佈為主，觀察環型塗佈在不同黏滯數矽油與不同距離下在旋轉塗佈製程上的差異性，探討邦得數(Bo)與臨界半徑(Rc)的無因次化、不穩定手指數(Nf)、波長(λ)的關係。實驗結果發現對環型塗佈而言，其臨界半徑不像中心塗佈隨邦得數增加而有先遞增後遞減的現象，而是呈現平穩趨勢。不穩定手指數目方面，其生長趨勢有先平穩後急速增加。波長的趨勢為可分為三段分別是平穩、急速降速、平穩。而就不同黏度矽油的比較，發現低黏度的矽油流體因黏滯數低使塗佈半徑較高黏滯數大，在離心力的加速引響下，使得臨界半徑更是加速成長，不穩定手指也是加速產生，但是因塗佈外徑與不穩定手指數目的增加趨勢ㄧ致，使得波長反而較小。就應用方面可知，低轉速，Bo < 4 ，中心旋塗較環形旋塗適合，而中轉速，既邦得數介於4 < Bo < 626之間，則以環形旋塗較適合，高轉速，Bo > 626，則兩者的差異已不大。

關鍵字

環型旋塗 ； 旋塗

並列摘要

The traditional silicon covers is mainly on way to rotate coating.The liquid covers,centrifugal force make the stability finger happen.This experiment is different from the traditional silicon covers coating experiment on ring type coating.Observe ring coating in different to viscosous silicon and rotate radius.The experimental result finds that as for ring type coating, its critical radius does not like increase with the central type has first increasing and after decreases, but the steady trend appears. The unstably finger,increase rapidly after its growth trend is steady first. The wavelength can be divided into three sections, steadily and lower the speed ,steadily.On different viscosity comparison ,find low viscosity because low viscid force make coating radius than high viscosity,centrifugal force make the critical radius to grow up with higher speed even more, the unstable finger is produced with higher speed too, But the external diameter of the coating and unstable finger increase cause the wavelength small than high viscosity.
In application,we can know on , 4 < Bo, the central coating is suitable than annular coating , and 4 < Bo <626, the annular coating is suitable than central coating .At Bo > 626, the differences between them are not big.

並列關鍵字

annular Spin coating ； Spin coating

參考文獻

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