電校式電阻感測器校正方法之研究

Research of microbolometer calibration by electrical calibration method.

張明化(Ming-Hua Chang)

指導教授 ： 歐陽盟

國立中央大學/理學院/光電科學研究所/碩士(2007年)

摘要

熱型紅外線感測器與量子型紅外線感測器相比，雖然反應時間較慢、靈敏度較低，但其可操作在室溫環境下，因此可以擺脫低溫冷卻系統，降低其系統的製作成本、體積及功率消耗。近年來隨著製程、微機電及材料科技的進步，使得熱型紅外線感測器的效能得以提升，增加其應用價值。 在本論文中將介紹以microbolometer 為偵測器的熱型紅外線感測系統及讀取電路架構，並進行讀取電路之設計，此設計是以Wheatstone bridge與Feedback balance circuit方式來讀取感測器所吸收紅外線的能量。 吾人採用友力微系統製造公司提供的50μm×50 microbolometer，操作電壓為單電源0.5伏特，所欲讀取之microbolometer的電阻約為220kΩ，TCR 為-0.02/K，讀取電路輸出結果為29.53μV/℃左右。

關鍵字

讀取電路 ； 微輻射感測器

並列摘要

Thermal detectors have slow response time and low sensitivity compared with photo detectors, but they can operate in room temperature. For this reason, thermal detectors can get rid of the expensive cryogenic cooling system and reduce the system cost, volume and power consumption. In recent years, by the progressing of fabrication, micromachining and material technologies, these will improve the performance of thermal detectors and increase their applications.
In this thesis, we will present a thermal detecting system and the architecture of its readout circuit, which utilizes the microbolometer detector. The readout circuit is designed by using Wheatstone bridge and Feedback balance configuration to read out the infrared energy that is absorbed by the microbolometer.
Based on the microbolometer provided by UNIMEMS. A single power supply of 0.5V is used in these two circuits. The microbolometer with resistance of 220 kΩ and TCR of -0.02/K is used in detecting , and the output result of the readout circuit is about 29.53μV/℃.

並列關鍵字

Read out circuit ； Microbolometer.

參考文獻

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