電化學放電加工應用於石英玻璃之研究與分析

The Study of Drilling on Quartz by Electrochemical Discharge Machining

林愈森(Yu-sen Lin)

指導教授 ： 洪勵吾

國立中央大學/工學院/機械工程學系/碩士(2010年)

摘要

隨著微機電系統的發展，光學玻璃與石英等非導電材料的應用遽增，電化學放電加工是非導電硬脆材料加工製程的新興技術，具有相當的發展潛力和高附加價值。
本文採用直徑100μm之碳化鎢作為刀具，氫氧化鉀為電解液，對石英玻璃進行電化學放電加工，以單一因子法分析各加工參數（如：操作電壓、電解液濃度、脈衝頻率、加工能率、電流波形、進給速率）之影響；並利用田口實驗方法分析加工參數（如：操作電壓、電解液濃度、脈衝頻率、加工能率）的相對重要性。
實驗結果顯示，由單一因子法得知，最佳參數偏向於低的操作電壓、低電解液濃度以及較高的脈衝頻率。分析出之結果最佳參數分別為加工電壓40V、加工能率20％、電解液濃度20％、脈衝頻率100 KHz；由田口法得知 ，操作電壓大小對於加工孔徑影響最大，貢獻率達59.84％；並且以最佳參數進行加工，得到加工孔徑約 166μm。最後本文在電解液內加入肥皂水，成功的減少氣泡膜成長時間，孔徑過切量降至143μm。

關鍵字

石英玻璃 ； 電化學放電加工

並列摘要

The optical materials such as Pyrex and quartz are widely used with enormous potentialities and highly added value. However, the machining of non-conductive brittle materials is remaining as a big concern. The new developed technology, electrochemical discharge machining (ECDM), is a promising process for machining non-conductive brittle materials.
In present thesis quartz is machined by ECDM. A tungsten carbide cylinder with diameter of 100 micro-meters is selected as the electrode tool. KOH is selected as the electrolyte. In this research, the single variable method and Taguchi statistical method are used to analyze the influence of the parameters(such as applied voltage, concentration of electrolyte, pulse frequency, duty, current waveform, tool feeding rate, etc) on the over cut of the drilling and the relative importance among parameters.

From experimental results, it shows that applied voltage has relatively large influence on machining. The optimal parameters are taken for drilling the quartz, and a hole with diameter of about 166 μm is obtained. Finally, it is successful in reducing the gas film thickness when the liquid soap is added to mix with the KOH electrolyte, and the hole with diameter of about 143 μm is obtained.

並列關鍵字

Quartz ； Electrochemical Discharge Machining

參考文獻

1. H. Kurafuji and K. Suda, “Electrical discharge drilling of glass,” Annals

microstructuring of Pyrex glass wafers by spark-assisted chemical

rate,” Bulletin of the Japan Society of Precision Engineering, Vol. 7,

pp.114-118, 1983.

Royal Society, London, pp.403-429, 1987.