即時影像引導連續式微電鍍之立體微結構製作研究

Research on Real-time Image Processing Guided Micro-Anode Electroplating for fabrication of three-dimensional microstructure

邱永傑(Yong-Jie Ciou)

指導教授 ： 黃衍任

國立中央大學/工學院/光機電工程研究所/碩士(2011年)

摘要

本研究主要目的為發展一結合即時影像擷取、影像處理及定位控制技術之系統，並將此系統運用在微陽極導引電鍍製程(Micro-Anode Guid Electroplating, MAGE)中，以製備三維複雜形狀之銅金屬微結構物(微米彈簧)，並探討透過控制在微結構物上進行局部電化學反應的表面區域，對沉積之微米銅金屬結構物形貌之影響。
本研究以微陽極導引電鍍製程為基礎增設雙CCD影像監控系統，藉由此系統擷取電化學反應之影像，將影像透過處理定位微陽極及微結構物之位置，以此資訊控制微陽極頭之運動路徑。本研究成果顯示以「即時影像導引連續式微電鍍」系統所製作之微結構表面平整，柱體粗細均勻，且能控制三維微結構物之形貌。

關鍵字

銅金屬微米結構 ； 即時影像處理 ； 陽極導引電鍍 ； 局部電化學沉積 ； 雙CCD影像監控

並列摘要

The purpose of this research is to develop an image based positioning controller for the Micro-Anode Guided Electroplating (MAGE) system. It is show by experiments that this controller successfully improves the quality of three-dimensional complex micro-structure planting process. Furthermore, in addition to traditional two dimensional objects, this image guided MAGE system is also with the ability to manufacture complex three-dimensional objects such as stress-less springs.

並列關鍵字

Real-time image processing ； Micro-anode guided e

參考文獻

[1] J. D. Madden , S. R. Lafontaine and I. W. Hunter, ”Fabrication by Electrodeposition: Building 3DStructures and Polymer Actuators” Sixth International Symposium on Micro Machine and Human Science,(1995). IEEE, pp.77-81

[3] E. M. El-Giar, U Cairo, and D. J. Thomson, Proceedings of 1997 Conference on Communications, Power and Computing; Winnipeg, MB; May 22-23, (1997), pp.327-332

[4] R. A. Said, ”Microfabrication by localized electrochemical deposition: experimental investigation and theoretical modeling”, Nanotechnology 14(2003)523-31

[5] C. S. Lin, C.Y. Lee, J. H. Yang, Y. S. Hung, “Improved Copper Microcolumn Fabricated by Localized Electrochemical Deposition” , Electrochemical and Solid-State Letters, (2005) C125-C129

[6] S.H. Yeo,J. H. Choo and K. S. Yip, “Localized electrochemical Deposition─the growth behavior of nickel micro-columns”, Proc.SPIE 4174(2000)30-9