大面積石墨烯薄膜自動化光學檢測技術之開發

The Development of the Automatic Optical Identification for Large-area Graphene Films

楊哲明(Che-Ming Yang)

指導教授 ： 王祥辰

國立中正大學/工學院/光機電整合工程研究所/碩士(2013年)

摘要

在未來，石墨烯薄膜將會被廣泛的應用，工業化大量生產出大面積的石墨烯薄膜將會成為一種趨勢，本研究目的在於能建立一套大面積石墨烯薄膜的分析。在本研究中，首先建立出分別在二氧化矽(300nm)/矽基板與玻璃基板上不同層數石墨烯薄膜頻譜特徵資料庫，此資料庫的建立是由本實驗的影像擷取系統結合多頻譜影像技術，最後使用主成分得分圖建立出在不同基板上各層數的數學判斷式。當未知的樣品需要辨識時，我們就將其頻譜特徵輸入判斷資料庫進行分析，最後我們使用色彩影像再現技術將不同顏色標示出不同層數的位置。這樣的方法與先前研究的差異在於本研究無須特定基板即完全沒有光學干涉所給予在樣本上擁有色對比的條件下，能夠具有大面積、快速、便宜以及具人性化直接視覺的非破壞性光學檢測技術。

關鍵字

光學檢測 ； 石墨烯

並列摘要

In this study, we established a rapid analysis system for few-layer graphene films. First, we create the database for different layers of graphene films spectral characteristics on SiO2(300nm)/Si substrate and the glass substrate, respectively. This database was created by the image capture system (ICS) and multi-spectral imaging technology. Finally, we use principal component score plot to create a database to determine different layers on different substrates. When the unknown sample need to identify, we will enter it into database to analysis. Finally, we use different colors to mark the position of different layers. In this study, we analysis and marked graphene layers on the SiO2(300nm) / Si substrate and the glass substrate, successfully.

並列關鍵字

Optical Identification ； Graphene

參考文獻

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