平行度平面度量測系統

Development of Measurement System for Parallelism and Flatness

陳冠宏(GUAN-HONG CHEN)

指導教授 ： 鄭志鈞

國立中正大學/工學院/機械工程學系/碩士(2013年)

摘要

本研究目的為研發一種量測快速、架設簡單的平行度與平面度量測方法。由於現行的平行度以及平面度量測設備主要以簡易的千分錶為主，如需要更高的精度則需要光學量測儀器如雷射干涉儀，而使用千分錶量測多為依靠人眼記錄以至於的精度不足且誤差大；光學量測設備價格昂貴且架設方式繁複易受量測環境限，以上兩種方法皆需使用基準面。研究中所提出的量測方式訴求不需要架設基準面，因此量測結果皆為相對平行度以及相對平面度，而非使用基準面的絕對平行度與平面度，利用向量的相對概念以量測起始點做為比較基準點，動態量測線性滑軌和掃描待測平面，即可得知相對平行度及相對平面度。相對平行度量測法的實驗與現行業界常用之設備千分錶比較量測結果誤差約在3%以內，此量測方法的穩定度及重現性也遠高於使用千分錶；相對平面度量測的實驗結果也清楚的將實驗用平板的平面度狀態正確的圖形化顯示。

關鍵字

相對平行度 ； 平面度 ； 平行度 ； 相對平面度

並列摘要

A system used to measure the parallelism and the flatness is developed. The parallelism is measured using two displacement sensors, whereas the flatness is by three. In the proposed measuring methodology; both parallelism and flatness requires no measuring reference which traditionally is made elaborately and expensively, e.g. granite with perfect flatness. Nevertheless the resulting parallelism measured using the proposed system is called relative parallelism and relative flatness instead of parallelism and flatness. The advantage of the proposed measuring parallelism system is not only less expensive but also that the error caused by the fixture motion is avoided. Tests were performed to access the performance of the measuring parallelism system on a pair of straightedge rails installed in parallel on a machine tool with a length of 1715mm and a maximum straightness deviation of 0.02 mm. Results show that the measured deviation in parallelism of rails was less than 3%. The same concept is adopted in the proposed flatness measuring system. A probe that consists of three displacement sensors is designed to validate the flatness measurement methodology. Tests were performed on a metal square plate of 200mm by 200mm. Results show that the flatness of the platecan be measured and then quantified easily.

並列關鍵字

relative parallelism ； flatness ； parallelism ； relative flatness

參考文獻

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