- 學位論文
二氧化鈦摻雜石墨烯的紫外光偵測器製備與光電特性研究
Studying the Fabrication and Photoelectric Characteristics of the TiO2 Composite Graphene UV Photodetector
摘要
本文先以熱蒸鍍法將鋁蒸鍍在銅箔上，接著以 CVD 法將石墨烯成長在銅箔上，之後再將其轉印到 Si 基板上以製備石墨烯光偵測器，而為了增加紫外光的吸收我們使用液滴塗覆法 (Drop coating) 將二氧化鈦溶液沉積在石墨烯光偵測器上形成石墨烯複合材料光偵測器，而本碩論目的在探討不同層數的二氧化鈦對石墨烯複合材料光偵測器的光電特性影響。 由實驗結果可知，在 365 nm LED 照射下，未沉積二氧化鈦薄膜前石墨烯光偵測器的響應率 (responsivity)、上升時間 (rising time) 及下降時間 (falling time)、電流開關比 (on-off ratio) 分別為：1.03 A / W、0.051 s、0.115 s、Ion / Ioff = 1.47；而在沉積第二層的二氧化鈦時有最好的光電特性：響應度 (responsivity)、上升時間 (rising time) 及下降時間 (falling time)、電流開關比 (on-off ratio) 分別為：2.68 A / W、0.04 s、0.048 s、Ion / Ioff = 3.55，推測其原因是因為氧化物半導體奈米顆粒照射紫外光後，吸附於的表面的氧分子脫附，使得通過元件的電流上升，進而使得光電特性獲得提升。
並列摘要
In this article we prepare the graphene photodetector in three steps. First, we deposited aluminum on the copper foil by thermal evaporation, second, growing graphene on a copper foil by CVD method, third, it is transferred onto the Si substrate to manufacture graphene photodetector, and in order to increase the absorption of UV light, we us droplet (Drop coating) to deposite titanium dioxide on graphene photodetectors formed graphene composite photodetector, which aims to explore the different titanium oxide layers to effect titanium dioxide - graphene composite photodectector optical characteristics of photoelectric detectors. From the experimental results, the responsivity, rising time and falling time, on-off ratio of the graphene photodetector is measured respectively in the 365 nm LED light：1.03 A / W, 0.051 s, 0.115 s, Ion / Ioff = 1.47 ; while depositing a second layer of titanium dioxide has the best optical features: responsivity, rising time and falling time, on-off ratio, respectively: 2.68 A / W, 0.04 s, 0.048 s, Ion / Ioff = 3.55 ; the reason is presumably because the ultraviolet light irradiation of the oxide semiconductor nanoparticles adsorbed desorption of oxygen molecules on the surface, so that the current component through rising, therefore the optical features is increase by the above reason.
參考文獻
延伸閱讀
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