熱電薄膜發電元件主要是利用熱電效應,將溫度差轉為電壓、電流輸出,而本研究主要利用電沉積法做出可撓式3-D碲化鉍系薄膜發電元件,其3-D結構是利用刮塗法於不鏽鋼基材上製備聚苯乙烯球模板,並於常壓下以橫電位電沉積出具有3-D結構的碲化鉍基熱電薄膜後,在進行熱壓、熱壓+純粹退火以及熱壓+電流輔助退火處理。熱電元件在組裝時,由於不能直接應用於不鏽鋼上,必須以電絕緣性佳且熱傳導性較低的材料做為基材。而本實驗利用聚亞醯胺樹酯來對熱電薄膜進行轉移,將此熱電薄膜製作於PI軟性基板上,具有可撓式、容易操作等優點。並對於轉移後的熱電性質作探討。 實驗結果顯示,Power factor的最大值皆出現在熱壓+電流輔助退火時,p-type的最大值為1071.1μW/K2m,n-type則為694.7μW/K2m。並且利用熱壓+純粹退火處理並以聚亞醯胺樹脂為基材時,所得串聯1對和2對p-n對熱電薄膜再以Ni做為導電電極進行電訊量測,冷熱端溫差一樣為20K時,開路電壓為4.73/9.44mV、短路電流為137/120μA以及最大輸出功率為299/567nW。
The thermoelectric effect of thermoelectric generators were used to convert temperature difference to voltage、electric current. This study were devoted to make flexible 3-D Bismuth-Telluride-based thin films thermoelectric generators fabricated by a electroplating method. The 3-D Bismuth-telluride-based thin films were prepared by potentiostatic electrodeposition technique onto three-dimensional polystyrene templates which were formed on stainless steel substrates via blade coating method, hot pressing 、 hot pressing + annealing and hot pressing + current assisted annealing method was further treated. When thermoelectric generators were assembled, it could not use directly on to the stainless steel, it must have great electrical insulating properties and low thermal conductivity of the material as a substrate. In this study, this thermoelectric films were transferred by using polyimide resin and thermoelectric thin films on polyimide sheet which have flexible and easy to use. We also investigate the thermoelectric properties after it were transferred. The results show that the maximum power factor of the film was 1071.1 μW/K2m for p-type Bismuth-Antimony-Telluride and 694.7 μW/K2m for n-type Bismuth-Telluride-Selenium , it all appeared in hot pressing+current assisted annealing.When polyimide resin as substrates, the open-circuit voltage of 4.73/9.44mV, short-circuit current of 137/120μA and estimated maximum output power of 299/567nW by Ni electrodes and a temperature difference of∆T=20K.