- 學位論文
應用埋入式金屬薄膜布拉格光纖光柵感測器於溫度與振動之量測
Study of Temperature and Vibration Measurements of Metal Film Embedded Fiber Bragg Grating Sensor
摘要
本研究應用微機電中之電鑄技術，成功開發出將布拉格光纎光柵感測器埋入鐵-鎳金屬薄膜之製程，並利用金屬薄膜的熱膨脹係數搭配與振動特性，分別分析其輸出訊號對應於溫度循環及振動參數之關係。本研究首先探討金屬埋入式光纖光柵感測器於溫度量測過程的敏感度與穩定性，然後分析金屬薄膜承受不同撓度狀態時，光纖光柵感測器應變梯度、中心波長飄移及半峰全幅值之變化情形，以獲得金屬薄膜變形之訊號變化特性。接著予以金屬薄膜強制振動，觀察其光纖感測器輸出之中心波長變化，以判別其振動振幅，再經由快速傅立葉轉換，即可獲得其振動頻率。最後，量測實際振動源，藉以印證金屬埋入式光纖光柵感測器之應用特性。
並列摘要
In this thesis, a new electroforming technology has been proposed for embedding a Fiber Bragg Grating (FBG) sensor into Fe-Ni metal film. The reflected signals of FBG sensor relating to temperature and vibration are investigated on the basis of the matched thermal expansion coefficient and vibration characteristics of the metal film. Firstly, the sensitivity and stability of temperature measurement are obtained through a specified temperature cycle. Secondly, a deflection test of the metal film is performed. The relationships among the strain gradient of the metal film, the shift in Bragg wavelength and full width at half maximum (FWHM) of the reflected spectra are then investigated. Thirdly, the amplitude and frequency of vibration of the metal film can be extracted via the reflected spectra analysis and fast fourier transformation (FFT) as the metal film is subject to a forced vibration. Finally, the performance of the metal film embedded FBG sensor for vibration measurement is verified from a real experiment. The case study show that it agrees well with the analysis results