表面精密加工製程之流場模擬分析

本研究主要是針對不同表面處理加工機制，分別以化學氣相沉積(Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition ECR-PECVD)及磁流變研磨拋光技術(Magnetorheological Abrasive Flow Finishing, MARFF)兩個主題，進行流場的數值分析。CVD為鍍膜機制，MRAFF則為研磨機制。化學氣相沉積主要原理是置前物透過擴散、對流的機制於基底上形成緻密的薄膜，主要優點為不受材料及鍍材的限制，。磁力研磨拋光技術是利用磁流變拋光液在高磁場強度的作用下，使拋光液成為具有黏塑性的Bingham介質，當此介質接觸工件時，能產生極大的剪切應力，進而去除工件表面多餘的材料，達到拋光的目的。目前結果顯示，於CVD的部份，我們可預測不同參數下(如:入口大小、入口速度及基底旋轉轉速)，流場的情形和薄膜沉積的情況(包括沉積率、轉換效率及均勻度)，而關於MRAFF，我們則得知當流體流經不同的外加磁場時，因入口壓力及幾何構型上的變化，所產生不同的誘發電流、磁場，進而導致不同的切削效果。

關鍵字

化學氣相沈積；計算流體力學；磁流變拋光研磨

並列摘要

A numerical analysis of the flow field for Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition(ECR-PECVD)and Magnet-orheological Abrasive Flow Finishing (MARFF) . ECR-PECVD is for coating and MRAFF is for grinding. ECR-PECVD introduces power into the reactor through different means such as the radio frequency microwave and so on, In this process, the application of forced convection and diffusion lead the precursor gases and precursor to the substrate surface .The major advantages for ECR-PECVD is the material and coating material for free from restrictions .MARFF under the influence of high intensity magnetic field behaves like a Bingham medium. When the medium contacts the workpiece, there exists a significant shear stress that is capable of removing the excessive material from the workpiece. The major advantages can work on the complex objects. The results showed that, in the part of ECR-PECVD, we can predict different parameters (for example: the entrance size, velocity and the substrate rotation speed), the situation of flow field and deposition of thin film (including the deposition rate, conversion efficiency and Uniformity) And on MRAFF, we know when the fluid flow through different external magnetic field, due to import pressure and geometry on the changes induced by different currents、 magnetic field, thereby cutting the lead to different result

並列關鍵字

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參考文獻

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國際替代計量

表面精密加工製程之流場模擬分析

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