以奈米壓痕研究單晶磷化銦之變形機制與行為

Deformation behaviors and mechanisms of single-crystal InP by nanoindentation

劉弟如(Ti-Ju Liu)

指導教授 ： 簡賸瑞

義守大學/理工學院/材料科學與工程學系/碩士(2015年)

https://doi.org/10.6343/ISU.2015.00053

摘要

本研究中，運用奈米壓痕儀、微拉曼儀、掃描電子顯微鏡、聚焦離子束以及穿透式電子顯微鏡研究單晶InP(100)的奈米機械性質與變形行為與機制。
　　單晶InP(100)的硬度和楊氏模數是利用奈米壓痕儀中的連續接觸剛度方式進行量測。
　　奈米壓痕的實驗結果：可發現多數個斷點現象出現在力—位移曲線之負載部分。此外，微拉曼分析受壓痕影響之單晶InP(100)亦無發現相變化的存在。
　　利用穿透式電子顯微術以及擇區繞射分析，可清楚觀察差排沿著滑移系沿著{0001}基面與錐體平面 上相互交錯。
　　進一步，以差排理論估算受壓痕影響之單晶InP(100)之差排數目，以期可以與實驗上作一互補的驗證。另外，單晶InP(100)之破裂行為與破裂強度亦在本研究中探討。

關鍵字

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並列摘要

In this study, the nanomechanical characteristics of single-crystal InP(100) are investigated by using nanoindentation, micro-Raman, scanning electron microscopy (SEM), focused ion beam (FIB) and transmission electron microscopy (XTEM) techniques. Moreover, the hardness and Young’s modulus of single-crystal InP(100) are measured using a Berkovich nanoindenter operated with the continuous contact stiffness measurements (CSM) mode. The multiple “pop-ins” are observed in the load-displacement curve with increasing indentation load in a random fashion. And, no evidence of phase transformation is revealed by micro-Raman, the cross-sectional TEM (XTEM) and selected area diffraction (SAD) analyses. The nucleation of dislocations propagating along the slip systems lying on the {0001} basal planes and the pyramidal planes are observed in XTEM images. Based on this scenario, an energetic estimation of dislocation numbers is calculated in indented single-crystal InP(100) using classical dislocation theory. In addition, Berkovich nanoindentation-induced fracture toughness and cracking behaviors of single-crystal InP(100) are also discussed.

並列關鍵字

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參考文獻

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