高科技產業 Local scrubber 廢水回收系統之案例探討

Case Study on the Recycling of High-Tech Industry Wastewater Using Local Scrubber Wastewater Reclaims Treatment System

鍾侑民(Yu-Min Chung)

指導教授 ： 張迪惠 ； 白子易

朝陽科技大學/理工學院/環境工程與管理系/碩士(2012年)

摘要

摘要
本研究以Local Scrubber水回收再利用系統經過了在台中某半導體廠的現場測試，在平均處理水量為12 (M3/hr)的各項產水水質數據，均可達到原本設定的規格，其中以Ozone/UV/TSA-48-400 → Ion Exchange為操作模式的處理程序，為最佳的操作條件。
由濾袋式微過濾系統所構成的前過濾程序與第二過濾程序，濾袋規格為25 - 10μm與5 - 1μm時，即可將懸浮固體(SS)去除至 <1 mg/L的規格。 陰陽離子交換系統，不論是在高級氧化系統的前處理或後處理，都可將導電度與氟離子濃度處理至<50 µs/cm與<5 mg/L的規格，而且若操作得宜，數據將遠優於產水所要求的數據。另外在TOC去除率比較方面，添加TiO2觸媒 (TSA-48-400)是明顯有助於高級氧化對TOC的去除率提升。就單獨比較高級氧化對TOC的去除率，添加高效率二氧化鈦TiO2觸媒 (TSA-48-400)可將TOC的去除率由17.8%提升至29.6%( 當程序設計為AOPs →Ion Exchange)與由36.9%提升至48.7% (當程序設計為Ion Exchange →AOPs)。另外以Ozone/UV/TSA-48-400 → Ion Exchange操作模式為例，離子交換可去除39.5%的TOC，加上直接高級氧化的29.6%TOC去除率，整體的TOC去除率可達69.1%，回收率方面此系統的回收率均可維持在80 – 85%。高級氧化後所形成的有機酸類物質，是容易被陰離子樹脂所交換來去除。而且其TOC去除率是高於直接由高級氧化對TOC的去除率，這也是 AOPs →Ion Exchange操作模式所具有的優勢。

關鍵字

TOC ； Local Scrubber ； 高級氧化處理 ； 二氧化鈦 ； 離子交換

並列摘要

Abstract
This study conducted field test for Local Scrubber in a Taichung semiconductor factory. The water quality data meet the original set specifications under average processing capacity of12 M3/hr. Ozone/UV/TSA-48-400 -> Ion Exchange is the processing program of operation mode, as well as optimal operation condition.
The bag micro-filter system consists of pre-filtration process and secondary filtration process. The suspended solids (SS) are removed to <1 mg/L when the filter bag is 25-10μm and 5-1μm. Ion Exchange system can process the electric conductivity and fluorion concentration to <50 µs/cm and <5 mg/L before or after advanced oxidation treatment. If the operation is suitable, the data are superior to the data required by water production. Besides, as compared to TOC removal rate, addition of TiO2 catalyst (TSA-48-400) can help advanced oxidation significantly improve TOC removal rate. By comparing TOC removal rate of advanced oxidation, addition of TiO2catalyst (TSA-48-400) can increase TOC removal rate from 17.8% to 29.6% when the program is designed to be AOPs ->Ion Exchange, and from 36.9% to 48.7% when the program is designed to be Ion Exchange ->AOPs. This is the merit of the operation mode of AOPs ->Ion Exchange. Taking Ozone/UV/TSA-48-400 -> Ion Exchange as an example, icon exchange can remove 39.5% of TOC, plus TOC removal rate of 29.6% by advanced oxidation, and the overall TOC removal rate can reach 69.1%. Organic acids produced from advanced oxidation are easily removed by resin anion exchange. TOC removal rate is higher than that using advanced oxidation.

並列關鍵字

advanced oxidation treatment ； Local Scrubber ； TOC ； titanium dioxide ； ionic exchange

參考文獻

1. 黃建彬，以高級氧化程序處理半導體製程中洗滌塔廢水之效率研究，國立台灣大學工學院環境工程學研究所碩士論文，(2008)，台北。

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