利用電漿沉積與添加酚醛樹脂製備高靈敏度與抗水性濕度感測器

Fabrication of high sensitive and water- resistive humidity sensor by phenol formaldehyde resin and plasma treatment

林秀珈(Hsiu-Chia Lin)

指導教授 ： 陳克紹

大同大學/工程學院/材料工程學系所/碩士(2006年)

摘要

感測元件製備以不同比例酚甲醛樹脂(phenol-formaldehyde resin)與水溶性單體NaSS (Sodium styrenesulfonate)混合後，以UV光接枝聚合於基材表面。在濕度改變時因吸水解離會提升離子導電，酚甲醛樹脂可以防止離子流失，故可以得到高的濕度感應性，此相對濕度感測器在一般環境下可長時間放置，但沒有好的抗水洗效果。本研究的改良方法在梳型電極表面以電漿PECVD的方式沉積HMDSZ (hexamethyldisilazane)薄膜 ，此薄膜表面具有疏水性又具活性基與過氧化基的特性，活性基與過氧化基以利後續接枝聚合，可化學結合固定濕度感應膜，可以期待膜具有耐抗水性質。結果可知阻抗測量變化範圍為4 order在相對濕度35~95%。由電漿前處理後遲滯效應由原本13.6%下降至1.4%。抗水性阻抗測試在酚甲醛樹脂添加量越多與電漿前處理阻變化與重量變化越少，反應時間R.H.63%到93% 在6秒內即可反應完成。

關鍵字

酚醛樹脂 ； 電漿沉積 ； 濕度感測器

並列摘要

For fabricating the excellent water-resistant humidity sensitive layer, the organic humidity sensitive monomer mixed with phenol-formaldehyde resin solution was successfully prepared by spin-coating on comb-shaped electrodes. The spin-coating sensitive layers were exposed to UV-light to induce grafting and curing reaction. Mixing with the resin solution cam improve the adhesion between the polymerized film and electrode substrate. Unfortunately, it tends to solve in water because the adhesion between the copolymerized monomer and electrode substrate is poor. When we deposit hydrophobic HMDSZ (hexamethyldisilazane) plasma film onto the comb-shaped electrodes as an interface before grafting, the plasma treatment can provide the free radicals that can bond with humidity-sensitive polymer strongly by graft reaction, therefore the device has a good water resistivity.
The impedance can very by 4 order between humidity of35~95%. Temperature dependence, hystersis, response time, water durability under various environments were also investigated.

並列關鍵字

plasma treatment ； phenol formaldehyde resin ； humidity sensor

參考文獻

[1] N. Yamazoe, Y. Shimizu, Humidity sensors: principles and applications,

Sens. Actuators 10 (1986) 379–398.

[3] B.M. Kulwicki, Humidity sensors, J. Am. Ceram. Soc. 74 (1991) 697–708.

[6] Y. Sakai, Y. Sadaoka, M. Matsuguchi, Humidity sensors based on polymer thin films, Sens. Actuators B 35 (1996) 85–92.

[8] C.-W. Lee et al. / Sensors and Actuators B 109 (2005) 315–322