長週期光纖光柵感測器於震動及溫度應用之研究

THE STUDY OF A LONG PERIOD FIBER GRATING SENSOR FOR VIBRATION AND TEMPERATURE APPLICATIONS

陳明俊(Ming-jun Chen)

指導教授 ： 蔡五湖

大同大學/電機資訊學院/光電工程研究所/碩士(2005年)

摘要

在本論文中，我們提出一個新穎的長週期光纖光柵感測器。我們所量測到的訊號是在光柵區域傳遞模態的輻射損失之變化。為了增加感測器的靈敏度，我們側邊研磨單模光纖至接近核心的地方，並藉由感應式耦合電漿系統(ICP-RIE)在光纖的磨面上蝕刻出長週期光柵。本感測器可以量測到由壓電陶瓷震盪片所產生10.791MHz的超聲頻震盪訊號、物理擺和水泥結構所產生的低頻震盪訊號、以及本身週遭環境溫度的變化。此外，長週期光纖光柵感測器還有體積小、容易製作、便宜等優點。實驗結果顯示此感測器從低頻到高頻皆有良好的感測響應。在溫度量測方面，兩個通訊波長1305.7nm和1553.4nm，其穿透功率對溫度的感測結果都有線性的反應。因此，長週期光纖光柵也適合做為溫度感測器使用。

關鍵字

溫度 ； 震動 ； 長週期光纖光柵 ； 感測器

並列摘要

A novel long period fiber grating (LPFG) sensor is presented. The sensing signal we measured is the change of the radiation losses of the propagating mode within the grating region. For increasing the sensitivity of the sensor, we polish the fiber into the core region and then etch a long period grating on the side-polished surface by virtue of ICP RIE technique. The sensor can measure ultrasonic frequency vibration signal up to 10.791 MHz for PZT disk, low frequency vibration signal for physical pendulum and concrete structure, and the environmental temperature variation. In addition, small size, easy fabrication, and cheap all are the advantages of the LPFG sensor. The experimental results have very good frequency response from low to high frequency region. In temperature measurement, the sensing results all have a linear response against temperature at two communication wavelengths of 1305.7nm and 1553.4nm. Therefore, the long period fiber grating is very suitable to be a temperature sensor.

並列關鍵字

long period fiber grating ； sensor ； temperature ； vibration

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