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  • 學位論文

添加稀土元素對LiNbO3薄膜之光學特性影響

The optical studies of doping effect of LiNbO3 films by spin coating method

指導教授 : 胡毅
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摘要


本論文主要利用可精準控制成分、低製程溫度與製程時間短的化學溶膠 - 凝膠法(sol-gel)來製備鈮酸鋰(LiNbO3)薄膜於Si晶片上,添加EG當作黏著劑,以LiNbO3 : EG = 1 :0.5 的比例混合,並探討添加Ti以及稀土元素Er、Dy在空氣氣氛下不同熱處理溫度、不同濃度下對鈮酸鋰薄膜光致發光的影響。我們利用XRD確定溶膠–凝膠法合成出來的LiNbO3的結晶相和結晶平面,結晶出來的表面形貌由SEM來觀察,並且用拉曼光譜分析儀量測所加入的Er、Dy、Ti是否參雜入LiNbO3結晶相中,最後以螢光光譜儀做發光特性探討。其中,以此製程得到優選平面為(012),並且觀察到當參雜Dy、Er的莫耳百分濃度上升時,LiNbO3表面小圓球狀晶粒較細小,以及由螢光光譜得到Ti對整體發光特性影響不大,我們不管是參雜 Er 或者是參雜 Dy,皆可以造成微量的發光現象。

並列摘要


LiNbO3 films are prepared by sol-gels method using spin coating technique which can take the advantage of precise composition control, low processing temperature, and non-time comsumed.The films were coated on the silica wafers which were cutted into the same fine size. Adding EG as improving viscosity in the sol-gel process is necessary. The molar ratios of the LiNbO3 and EG are 1:0.5. The experiments are investigated into light-induced characteristic via sol-gel route followed by heat-treating at temperature between 550℃ and 700℃ under air atmosphere and different concentration of earth-rare elements which are Er and Dy. The crystallize structure and surface morphologies are characterized by XRD and SEM. The analysis of compositions and the luminescent characteristics is studied by Micro-Raman spectroscopy and PL spectroscopy, respectively.

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