電漿沉積及接枝聚合丙烯醯胺膜對生物分子固定及濕度感測器之應用

Surface Immobilization of Biomolecules onto Plasma Treated and Surface Grafted Acrylamide for Humidity sensors

涂煜杰(Yu-chieh Tu)

指導教授 ： 陳克紹

大同大學/工程學院/材料工程學系所/碩士(2007年)

摘要

利用電漿沈積金屬氧化物有機薄膜及UV光表面接枝聚合的方式，可在無機的微電子感測元件，如氧化鋁梳型電極基板的表面，進行逐步的有機化改質，易言之可固定DNA或抗體。本研究之目的是濕度感測元件以電漿PECVD 的方式，利用TMT 與O2 混合氣體(mixtures)於梳型電極上，沉積半導性氧化錫(tin oxide organic-like thin films)有機薄膜，做為感濕材料，為了增進濕度感測效果、阻抗變化的靈敏性與穩定性，再利用UV 光接枝聚合AAm，而將胺基固定在梳行電極上，再經過一些架橋劑及增加胺基的單體溶液處理後，使梳行電極表面上可利用戊二醛來固定經過設計的含單股胺基DNA (ss-DNA) 片段或抗體等等離子性分子，在濕度改變時離子會幫助導電。研究結果顯示以TMT:O2=40:80 (mtorr)沉積膜製作感測元件，表面可固定腸炎弧菌DNA或抗體，濕度感測器最佳感測範圍RH35~95%有5 order(從107 到102 W) 的變化。

關鍵字

微電子感測元件 ； 氧化錫(SnOx)有機薄膜 ； UV光接枝聚合

並列摘要

The plasma deposition and surface grafting polymerization have been used to gradually formed the organic layers on inorganic substrates such as interdigital electrodes devices for single strand DNA immobilization. In this study, the semiconductive tin oxide (SnOX) organic-like thin films were deposited by PECVD of TMT and O2 mixtures on the comb-shaped electrodes as the humidity sensor devices. To improve the sensitivity and stability for humidity sensing, the surface of the deposited flims was subsequently grafted with AAm (acrylamide). Hence, GA as cross-linking reagent to chemical bonding NH2-oligonucleotide probes on the surface of interdigital electrodes. As the surface of sensitive electrodes was immobilized the single strand DNA fragment of Vibrio parahaemolyticus or antibody, ionic molecules, etc. The grafted ionic molecules film enhances the impedance variations with humidity. When surface immobilization of antigen, the results appear the best sensitive range for humidity is R.H. 35～95％, and the impedance variations decreases by over 5 orders of magnitude from 107 to 102 W .

並列關鍵字

Microelectronic sensitive device ； UV-induced grafting polymerization ； SnOx organic-like films

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