- 學位論文
PDMS為基底的壓力感測器製作
Fabrication of Pressure Sensor Base on PDMS Substrate
摘要
隨著微機電技術近年來的蓬勃發展，許多感測元件利用微機電技術將其微型化，但微機電技術所生產的元件，大多是使用不具有可撓性之硬式基底，只能適用於單一平面上，使用範圍有所限制。較少利用軟性高分子材料當做基底來製作，使元件具有可撓性。 本研究利用微機電技術，並配合軟性高分子材料”聚二甲基矽氧烷”（PDMS）取代傳統硬式基底，進行設計與製作軟性電容式壓力感測器。以軟性材料作為底材，所製作出的電容式壓力感測器可增加應用範圍，因為感測器的整體結構為具有可撓性，當應用於各種不同曲面時，可適應於各種曲面的物體。介電層為PDMS，使其撓曲前後的初始電容值不易因撓曲而造成改變。並於每個感測點的四周設計變形緩衝溝槽，此溝槽具有使介電層於受壓後具有變形的緩衝空間，能有效阻隔兩個感測點間應變互相干擾，因此當壓力壓於單一點時，將不會影響到位於受壓點四周的感測點。 本感測器設計為3×3陣列形式，單一感測點面積為3×3㎜，實驗量測過程針對單一感測點施加0-12.8N負載，所量測出的結果顯示，本壓力感測器受力範圍於0-10N之間有較佳之線性度，10-12.8N有較為趨緩的趨勢，較佳點之靈敏度為0.86fF/Kpa。
關鍵字
PDMS並列摘要
MEMS(Micro Electro-Mechanical System) has developed vigorously and many kinds of sensor become microminiaturization by using this technology. But the component which made by this technology use the hard material, for example : silicon, glass and PMMA. A few people use the flexible material to be base. The sensor made by using traditional base material can not be flexed. It can be used on one plane surface and has its limitation. In this research, PDMS is used to replace the traditional base material to fabricate the flexible capacity pressure sensor. The sensor made by this material has more application and because the structure is flexible, it can be used on surface with inequality. And the dielectrophoretic layer is filled of PDMS to reduce initial data error caused by other force. Each point on the sensor has furrow around it. The furrow cut off other point’s stress and make sure that each point does not interfere with other point when it works. The sensor is designed to be 3×3 array. Each sensing area is 3x3mm2 . The sensor is sensing each point for 0-12.8N. According to the consequence when the pressure range is 0~10N, and when the range up to 10-12.8N,the consequence is not linear. The sensitivity of the better point on the sensor is 0.86fF/Kpa.