溶膠凝膠法製備V1-xMxO2薄膜與其電性之研究

The Study of Electrical Properties of V1-xMxO2 Thin Film by Sol-gel Technique

李尚祐(Shang-Yu Li)

指導教授 ： 胡毅

大同大學/工程學院/材料工程學系所/碩士(2009年)

摘要

二氧化釩(VO2)是一種具有金屬-絕緣體轉換(Metal-insulator Transition; MIT)性質的材料，從室溫到約68℃時，會從原先的半導體態轉變成導體態，並伴隨著電性、光學性質的變化，而被廣泛的應用智慧窗玻璃、熱敏元件等
並且，藉由摻雜不同價態的離子如高價態的W6+、Nb5+，可將相變轉化溫度點往室溫方向降低，低價態的離子Cr3+，提高相變轉換溫度，控制其相變化的機制，增加其應用性。
本實驗是利用溶膠凝膠(Sol-gel)的方法，來製備二氧化釩薄膜，經由結構的分析和電性的檢測來觀察在不同摻雜量之下對二氧化釩相變化機制的影響。

關鍵字

金屬-絕緣體轉換 ； 二氧化釩 ； 溶膠凝膠法

並列摘要

Vanadium dioxide has a property of Metal-insulator Transition. In the room temperature to 68℃, the VO2 undergoes phase transition, accompanied by drastic changes in electric and optical properties. It may used to Smart Windows and thermal element, and etc.
The phase transition temperature decreased with adding amount of high gap states which like tungsten ion or niobium ion increased. In the other hand, the phase transition temperature increased with adding chromium ion. In this phase transition mechanism, we can have more application in our life.
In this experiment, VO2 thin film was formed by Sol-gel, the synthesized VO2 thin film in different dopping percentage’s phase transition mechanism was analyzed by structure and electricity.

並列關鍵字

Metal-insulator Transition ； MIT ； VO2 ； Sol-gel

參考文獻

[4] 范珊瑋,“利用化學氣相沉積法製備具高電阻溫度變化係數之V1-xTixO2薄膜”, 國立清華大學材料科學工程學系碩士論文(2006)

[2] Brit. Pat, 540,844“Resistance Materials and Methods of Making the Same”, Oct 31st(1941)

[3] Brit. Pat,546, 597“Resistance Composition and Method of Making It”, June 8th(1942)

[6] P. B. Fabritchnyi et al., Solid State Communication. 74, 337 (1990).

[11] Ch. Leroux, “From VO2(B) to VO2(R) ： Theoretical structures of VO2 polymorphs and in situ electron microscopy,” Physical Review B, 57 (9),5111-5121 (1998).