- 學位論文
氧化鋅鋁導電膜力學性質之研究
Mechanical Properties of Aluminum-doped Zinc Oxide Transparent Conducting Films
摘要
軟性顯示器具有輕薄短小、不怕摔及柔軟、易於攜帶的特性，是未來隨身育樂生活不可或缺的產品。為了承載反覆的拉伸、捲曲與折疊，軟性顯示器當中導電膜的力學特性顯得格外重要，因此本論文旨在量測氧化鋅鋁 (Aluminum-doped Zinc Oxide, AZO) 透明導電膜的力學性質。 本論文中薄膜的製備方式分為兩種，第一種利用溶膠凝膠法製備AZO溶膠，以旋鍍方式沉積於玻璃基材上，量測薄膜之結晶性與力學性質，以探討最佳的溶膠凝膠法 (sol-gel method) 熱處理溫度。結果顯示熱處理溫度為650℃的AZO薄膜具有較小的表面粗糙度、較佳的結晶性，且簡化模數及硬度分別為83 GPa及4.1 GPa，明顯高於其他熱處理溫度。另一項製程則是利用射頻磁控濺鍍法沉積AZOY薄膜於玻璃及polyethylene terephthalate (PET) 塑膠基材上於室溫中，探討不同的濺鍍功率下AZOY薄膜之結晶性、透光性、導電性、表面形貌及力學性質。由量測結果顯示濺鍍功率70W時有最低的電阻率約2.6×10-2 Ω-cm ，在可見光波長範圍 400 nm~800 nm 之間AZOY薄膜沉積在玻璃與PET塑膠基材上皆約 80% 以上良好的透光率，除此之外，因玻璃基材有較佳的表面粗糙度與附著性，故AZOY薄膜在玻璃基材上有較佳的結晶性與力學性質。
並列摘要
Flexible displays will play an important role in future electronic products ranging from cell phones and PDAs to computers, toys, and electronic books due to their attractive properties including reductions in weight and thickness, improved ruggedness, and flexible form. To bear repeated tensions, bends, and folds, it is important to investigate the mechanical properties of components in flexible displays. This paper aims to measure the mechanical properties of aluminum-doped zinc oxide (AZO) transparent conductive thin film. The AZO films were deposited on the glass substrate by sol-gel method and further determine a better thermal treatment temperature in sol-gel process. In addition, AZOY films were also deposited on the glass and polyethylene terephthalate (PET) substrate at room temperature by RF magnetron sputter. Their optical, electrical, structural, and mechanical properties were measured to determine an optimal sputtering power. The results of the sol-gel method show that AZO films prepared at the thermal treatment temperature of 650℃ exhibited a smaller surface roughness and better crystallization; Moreover, its Young's modulus and hardness, 83 GPa and 4.1 GPa respectively, are much higher than the other two thermal treatment temperatures. The results of the RF magnetron sputtering method show that AZOY films have the lowest resistivity about 2.6×10-2 Ω-cm at 70W and all AZOY films show high transmittance over 80 % at 400 nm ~ 800 nm visible. In addition, the reduced modulus of AZOY films increased with increasing sputtering power. Moreover, the crystal quality and mechanical properties of the AZOY films deposited on glass substrates is much better than on PET substrate because of less surface roughness.