應用微分演化法於雙熱臂電熱致動器最佳化設計

Two Hot Arm Electro-Thermal Actuator Optimization Using Differential Evolution

楊盛行(Sheng-Shing Yang)

指導教授 ： 吳俊瑩

大同大學/工程學院/機械工程學系所/碩士(2010年)

摘要

在微機電的領域，電熱致動器是裝置動力的來源，為了使裝置的功能更好，研究的學者們紛紛透過最佳化的方式或新的設計方法改善電熱致動器的設計。雙熱臂電熱致動器即是先前學者們以傳統的單熱臂電熱致動器為參考設計進行改變，主要的目的是透過設計的改善得到較高的撓度位移與輸出力。
目前有文獻使用最佳化方法改善單熱臂電熱致動器的設計，但缺乏雙熱臂電熱致動器的最佳化設計，本研究將使用微分演化演算法整合有限元素軟體ANSYS進行雙熱臂電熱致動器最佳化設計。首先對傳統的單熱臂電熱致動器進行最佳化設計，透過與文獻最佳化的結果進行比較，以確認本研究的架構對於尋找電熱致動器的最佳設計是具有足夠的能力且方法可行的。然後再以相同的架構及方法，以文獻的雙熱臂電熱致動器設計為參考，對雙熱臂電熱致動器進行最佳化設計，尋找雙熱臂電熱致動器各個尺寸的最佳解。將最佳化設計的結果與文獻的參考設計做比較，透過最佳化設計程序，本研究提升了參考設計的位移量超過二倍，確實改善了文獻的設計。

關鍵字

微機電 ； 雙熱臂電熱致動器 ； 撓度位移 ； 微分演化演算法 ； ANSYS

並列摘要

In Micro-Electro-Mechanical Systems, electro-thermal actuator is the power of the device. In order to improve the performance of the device, the researchers try to apply the optimization method or a new design approach to change the design. Two hot arms electro-thermal actuator is adapted from the traditional one hot arm electro-thermal actuator for increasing the tip deflection and force output.
There are some studies in design optimization of one hot arm electro-thermal actuator, but no research of optimization of two hot arms electro-thermal actuator is found. In this study, the differential evolution is integrated with commercial finite element program ANSYS for design optimization of two hot arms electro-thermal actuator. First, the one hot arm electro-thermal actuator is investigated and the optimal result is compared with the reference to verify that the architecture and the optimization method used in this study are capable and feasible for optimization of one hot arm electro-thermal actuator. Then same architecture and method are applied to optimize the two hot arms electro-thermal actuator for finding the best dimension of the device. From the comparison of results of the optimum solution this study and the design in the reference, the tip deflection of reference design was increased by more than two times using optimization architecture of this study.

並列關鍵字

differential evolution ； deflection ； two hot arm electro-thermal actuator ； MEMS ； ANSYS

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