近年來生物晶片發展迅速,主因配合微機電技術的製程,可讓檢測晶片達到精巧、迅速、方便的目標。在高齡化的時代,健康和醫療更顯格外重要,因此,有關介電電泳對粒子的操控、分離和檢測等技術,皆已陸續被發展出來。本篇論文提出利用微機電製程技術並結合熱壓技術製作介電電泳晶片。 本研究中利用微機電技術技術,製作可提供3D電場的3D電極結構,目的在於能創造比傳統式平面電極更好的電場效果,同時在玻璃上製作3D電極可大幅降低晶片的價格且製作方便。 製作出的晶片經實驗證實,對生物粒子可產生吸附作用,同時利用此種方式製作的介電電泳晶片所產生的電場和傳統方式製作的介電電泳相比,不需提高電壓即可達到效果。
Biochip has developed effectively with the MEMS(Micro Electro-Mechanical System) technologies recently. The technique let biochip become smaller, faster and easier. Now, since the number of old person is getting more and more than before, health and medical treatment are become more important. And because of this reason, the biochip is applied to control and separate cells or particles. In this paper, MEMS technologies process are used to fabricate the dielectrophoretic biochip. In this research, the MEMS technologies which is used to make the 3-D electrode with the 3D electric field. The electric field will become huger than before. Fabrication 3D-electrode on glass can reach low cost and low time-consuming. The chip we fabricated is demonstrated that the electrode which is fabricated by MEMS technologies can manipulate the bioparticle. To compare with the traditional dielectrophoretic chip, the chip we made can work without elevating voltage.