- 學位論文
設計與製作微針陣列負離子產生器
Design and fabrication of negative air ions generator with micro needles array
摘要
近年來因科技發展，各國加速工業化，由於受到電子電器產品普 及與都市居住空間過於密閉的影響，環境的離子平衡遭受嚴重的破壞。 因此，以人工方式補充負離子的負離子產生機就逐漸受到大家的青睞， 而且各種相關的產品也熱烈問世。本篇論文主要是提出利用微機電製 程技術製作微針陣列於玻璃片上，施加電壓產生尖端放電並生成負離 子。 本研究為利用價格低廉且容易取得之玻璃片配合本實驗室已建 構之MEMS製程技術，設計並利用電鍍及蝕刻技術製作微針陣列 (Microneedle array)於玻璃片上，可降低底材與操作成本，以達成本研 究之目標。主要研究以電暈放電原理及實驗測試進行微針陣列的尖端 放電設計，再施加高壓直流電源及使用負離子量測儀器進行最後的量 測測試。 經實驗證實，此設計之微針陣列雖有針尖表面均勻度之限制，但 最終設計120支微針陣列針尖高度約4.5μm，製作於長30mm、寬18mm 之基座上，經放電及負離子量測儀器量測下，證實電壓790V、電流 0.6mA情況下、確實產生負離子量139000顆/CC。
並列摘要
In recent years, due to technological development and accelerating of many country industrialization. Due to popularity of electronic and electrical products and urban living space is too confined, the surrounding air ion balance is broken. Therefore, generator of adding negative air ions artificially were on the favor gradually, And various related products appear continually. This thesis is to propose micro needles array fabricated by MEMS on the glass substrate, generating negative air ions by applied voltage and tip discharge. This research uses cheap glass to cooperate with our laboratory constructed MEMS fabrication technology, design and the use of plating and etching techniques to fabricate micro needles array on the glass substrate.It can reduce the cost of the substrate and fabrication, to achieve the goal of this research. Corona discharge is the main research concept and experimental testing for the design of micro needles array tip discharge. Then applied high DC voltage and the use of negative air ions measurement instrument to measure finally. The experiment confirmed that the tip surface uniformity of designed micro needles array is limited, 120 microneedles tip height of final design is about 4.5μm,fabricated on the base of long 30mm,width 18mm. After discharge and negative air ions measurement instruments measuring, the 790 V, 0.6mA,it generate the 139000 ion /CC negative air ions.