O2/N2流量比對AISI 304不銹鋼電弧沉積氮氧化鈦複合膜特性之影響

Effect of O2/N2 Ratio on Characteristics of Cathodic Arc-deposited Ti-O-N Composite Films on AISI 304 Stainless Steel

林雅惠(Ya-huei Lin)

指導教授 ： 許正勳

大同大學/工程學院/材料工程學系所/碩士(2011年)

摘要

本研究以陰極電弧沉積(Cathodic arc deposotion, CAD)系統，配合使用不同流量N2、O2反應氣體與Ti靶反應披覆TiN薄膜及TiON複合膜於AISI 304不銹鋼基材上，然後進一步分析各鍍膜結構、特性(包括粗糙度、化學組成、附著性)以及進行AISI 304不銹鋼鍍膜前後之磨耗、極化腐蝕及浸泡腐蝕試驗，以探討O2/N2流量比對AISI 304不銹鋼表面性質之影響。
實驗結果顯示，此TiON複合膜結構主要是由TiN及TiO2-Anatase雙相混合而成，當O2/N2流量比為1/4 (O2：17 sccm，N2：68 sccm) 時，所獲得的TiON複合膜之結構最緻密、表面粗度最小(Rq值=0.261μm)及附著性最佳(HF1)。在耐磨耗方面，當O2/N2流量比為1/4時，由於其H/E值最高，故相對地其摩擦係數最小(0.428)。而在耐蝕性方面，不論是3.5 wt% NaCl或10 vol% HCl腐蝕媒介環境，披覆TiON複合膜層之基材，耐腐蝕性質皆能夠獲得提升，尤其是在O2/N2流量比為1/4所沉積之膜層提升效果最為優異。

關鍵字

AISI 304不銹鋼 ； 陰極電弧沉積 ； O2/N2流量比 ； 氮氧化鈦複合膜 ； 耐磨耗 ； 耐腐蝕

並列摘要

In this study, the TiN coating and TiON composite coatings were synthesized on AISI 304 stainless steel substrate by cathodic arc deposotion (CAD) system using different flow-rate of N2 and O2 reactive gases and Titanium (99.9 wt%) target. Then the coating morphologies and properties such as roughness, chemical composition, structure, and adhesion were all analyzed. Moreover, wear tests, polarization tests, and immersion tests were also performed for exploring the effect of O2/N2 flow-rate ratio on the wear and corrosion behavior for coated AISI 304 stainless steel.
The experiment results showed that the TiON composite coatings mainly consist of a mixture of TiN and TiO2-Anatase phases. When the O2/N2 flow-rate ratio is set at 1/4 (O2：17 sccm，N2：68 sccm), the TiON coatings obtained have a dense structure, smallest surface roughness (Rq value = 0.261 μm ), and the best adhesion (HF1). In wear resistance, the TiON coatings have a lowest friction coefficient (0.428) when the O2/N2 ratio is set at 1/4 to get the highest H/E value. Moreover, the optimum coatings have better corrosion resistance in 3.5 wt% NaCl and 10 vol% HCl solutions, respectively.

並列關鍵字

AISI 304 stainless steel ； Cathodic arc depositio

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