奈米碳管改質之類鑽碳膜物理性質及生物相容性研究

The Physical Properties and Biocompatibility of Carbon Nanotubes Modified Diamond-Like Carbon Films

張勛喨(Hsun-Liang Chang)

指導教授 ： 魏哲弘

大同大學/工程學院/機械工程學系所/碩士(2011年)

摘要

本研究利用旋轉塗布法將奈米碳管分佈於矽晶片上，再經由電漿輔助化學氣相沈積法，通以乙炔和氬氣混和氣體，沈積出類鑽碳薄膜。由拉曼光譜儀、X光電子能譜儀、原子力顯微鏡、接觸角試驗、MProbe反射儀、奈米壓痕儀等儀器探測類鑽碳膜的化學鍵結、表面、光學特性以及機械性質。此外，經由奈米碳管強化後的類鑽碳膜其生物相容性，將ECV304細胞培養於DLC上48小時並做細胞計量的檢測。
實驗結果顯示含碳管之類鑽碳膜，當碳管比例越高則ID/IG值、sp2/sp3比例越大，這顯示薄膜越粗糙而且表面呈現疏水狀態。在機械性質上，添加碳管的類鑽碳膜在硬度及彈性模數上比未含碳管的薄膜來得高。然而，過多的碳管將無法讓薄膜的硬度及碳性模數越高，同時，少量碳管可以減少內應力的提昇，可以有效增強薄膜於基材上的附著能力。在光學分面，有高比例的碳管會造成薄膜反射率的提昇，添加0.005wt％的碳管之類鑽碳膜，於400nm-700nm可見光範圍的折射係數結果上有最穩定的變化，結果顯示摻雜0.005wt％比例的碳管對於類鑽碳膜在光學上有較佳的性質。在生物相容性部份，細胞培養數量顯示，添加碳管的類鑽碳膜確實比未含碳管的類鑽碳薄膜細胞數量來得高，這證實了摻雜碳管的類鑽碳膜擁有較佳的生物相容性。

關鍵字

類鑽碳膜 ； 奈米碳管

並列摘要

The DLC films made of spin coating carbon nanotubes (CNTs) on silicon substrate and then deposited DLC via C2H2 and Ar. The films were examined by Raman spectra, XPS, AFM, contact angle test, MProbe reflectometer and nanoindentation to probe the chemical bonding, surface, optical and mechanical properties. To evaluate the bio-compatbility of CNTs assisted DLC, we also perform the cell culture of ECV304 for 48 hours.
The results show that for CNTs/DLC films, the higher content of CNTs increases the ratio of ID/IG, the sp2/sp3 ratio which leads to a rougher surface and hydrophobic surface. For mechanical properties, for CNTs addition, the hardnes and elasticity modulus increase compared to undoped DLC film. However, the hardness and elastic modulus of higher CNTs contents DLC films is lower than that in lower CNTs contents films. For low content CNTs in DLCs results in stress reduction which is advantageous to films adhesion. For optical properties, higher CNTs content tends to reflectivity reduction. For 0.005wt% CNTs/DLC film, the refractive index in the film has less variation for optical wavelength from 400 nm to 700 nm. This DLC film seems to have better reflection loss than undoped DLC films. For biocompatibility, the CNTs/DLC films exhibits a higher cell number than that of undoped DLC film. This demonstrates that CNTs modified DLC films has better biocompatibility.

並列關鍵字

nanotubes ； diamond-like carbon

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