X-ray 膜厚量測儀器設備校正探討

Investigation of the Calibration on X-ray Coating Measurement Instrument

張有道(Yu-Tao Chang)

指導教授 ： 許垤棋

大同大學/工程學院/生物工程學系所/碩士(2011年)

摘要

X射線膜厚量測儀能夠快速分析黃金和其他貴重金屬的膜厚,且具有精度高、穩定性好、強大的統計功能、測量範圍寬等優勢，可適用於各種不同的產品以及行業。正確的儀器校正，可以降低數據的偏差，使儀器發揮最高效用，能有效提高工作績效，並降低內外成本，進行有效的量具管理或工具及觀念的應用。本論文藉由ISO9001的方式建立X射線膜厚量測儀的校正步驟，包括MSA的量測系統分析結構GR&R分析測試，並且在進行量測系統分析過程中以適當的統計分析方式來驗證各種形式的測量及試驗設備其系統的校正品質。在委託顧客核准的品質管制計畫中其分析方法和允收規範，須符合量測系統分析參考受測中的相關規定，品質校正部份需納入顧客核准的品質管制計畫中的量測系統，在未經顧客同意前則不宜任意更動分析方法和允收規範。

關鍵字

儀器校正 ； X射線膜厚量測儀

並列摘要

The thickness of coating composed of gold or other valuable metals can be determined by X-ray Coating Measurement Instrument, which has high accuracy, high stability and capability for statistics analysis, and wide range for determination. Furthermore, it can be applied to a variety of products in various fields. Based on correct calibration of instrument, the deviation of measurement and the cost can be reduced, resulting in higher efficiency and better performance for industrial production. The measuring device can be efficiently managed and the concept can be developed. According to ISO9001, a stepwise calibration for X-ray Coating Measurement Instrument is established, including MSA measuring system and GR&R analytical system. During the measuring a statistical analysis is run to make sure the qualities of the measurement and even the instrument. The measuring and checking methods for the quality control provided by the customer should be integrated into our measuring system, without the permission of the customer the parameters for the measurement should not be altered.

並列關鍵字

instrument calibration ； X-ray coating measuring instrument

參考文獻

4. 福祿克基礎儀器校正─浩網科技股份有限公司.

8. 量測系統分析、校正標準書、報告─九德電子股份有限公司.

9. 量測系統分析管理辦法—耀登科技份有限公司.

3. 操作手冊、SPC統計製程管理系統說明--中方國際股份有限公司。

5. X-ray繞射基礎原理介紹─王如春 教授中華民國地籍測量學會會刊—邱明全；陳鶴欽；曾耀賢 ；劉正倫. 2010