摘要
本研究成功製備石墨烯應力感測器，以及探討應力對其之電性影響。我們將石墨烯應力感測器置於光學顯微鏡機台上，將點半徑為0.7 μm之導電探針，接觸於兩導電電極上，施加應力於基板上，使其產生應變，最後利用安捷倫半導體分析儀做其電性之量測。 根據電性量測結果，對石墨烯應力感測器施加負載後，改變了石墨烯的有效傳輸距離，其電阻也隨之改變，負載施加愈大其電阻也變得愈大，由未施加負載的電阻0.1704 MΩ，至施加負載50 g的1.1167 MΩ電阻值，所增加的電阻值為未施加時的5.55倍。且不管是電阻-負載關係曲線圖，還是石墨烯之應變百分比-應力曲線圖，皆呈獻線性關係。由此可見，我們製備了微米尺度的石墨烯感測器，在施加負載應力後，使得石墨烯有皮米 (picometer) 等級的伸長量，而電阻卻有明顯且規律的改變，顯示我們製備的石墨烯感測器，是一個靈敏度極高的應力感測元件。
並列摘要
In this paper, we fabricate graphene stress gauge successfully as well as discussed the impact of stress on the electrical. We Make the graphene stress gauge on platform of the optical microscope and employing the conductive probe to touch the conductive electrodes. Applying stress on the substrate and to produce strain. Then it makes the electrical measurement by employing the Agilent's Semiconductor Analytical Instruments. According to the result of the electrical measurement. It changes the effective transmission distance of the graphene and the resistance. The resistance before applying the loading is 0.1704 MΩ and increasing to 1.1167 MΩ by applying the loading of 50g. It has increased 5.55 times. Whether resistance - load relationship curves, or the strain percentage - stress relationship curves, they are presenting a linear relationship. It is showing, our grapheme stress gauge which is a high sensitivity of the stress sensing gauge.