- 學位論文
以實驗設計法做半導體廠鍋爐熱水供應系統節費之研究
The Study of Cost Saving for the Hot Water Boiler System in Semiconductor Plant with Design of Experiment
摘要
本研究利用實驗設計法（Design of Experiment，DOE），分析熱水鍋爐控制因子中對節費影響較顯著之重要製程參數，並找出各因子之關聯性。 研究中亦以建立兩階段實驗設計模式，第一階段將考量影響熱水鍋爐之因子並予以納入實驗範圍，找出影響熱水供應最適化之顯著因子。第二階段就熱水鍋爐之顯著因子，採用二水準因子之實驗設計法對於影響研究中之各實驗因子用Minitab進行規劃，其目的在於以較少的實驗組合而得合理及準確之分析結果。 此外，亦採用統計學上之變異數分析法(ANOVA)說明實驗因子對響應值（Response Value）之影響及因子間之交互作用關係，研究之方法將得到節費改善。
並列摘要
This study used the experimental design method (Design of Experiment, DOE), analysis of hot water boiler control factor in the more significant impact on the Programme fees important process parameters, and find out the correlation of various factors.Keywords: hot water boiler, experimental design, ANOVA. Two-stage study of Yi Yi experimental design model to establish the first stage is considered the hot water boiler of the factors to be included in the experimental range, find the optimal impact of significant water supply factor. The second phase of the significant factors on the hot water boiler, with two level factorial experimental design study for the effects of various experimental factors using Minitab to plan, aimed at the less derived from the experimental combination of reasonable and accurate results. In addition, using statistical analysis of variance (ANOVA) of experimental factors on the response (Response Value) and factors influence the interaction between the relationship between the research methods section of fees will be improved.