群組技術於晶圓廠布置之應用

The Application of Group Technology to the Facility Planning of Wafer Fab

陳建良(James C. Chen) ； 陳佳雯(Chia-Wen Chen) ； 徐盛宏(Sheng-Hong Hsu)

《中原學報》 29卷3期 (2001/09) Pp. 259-277

https://doi.org/10.6358/JCYU.200109.0259

摘要

晶圓廠的工廠佈置直接影響其生產效率，良好的工廠佈置可縮短搬運距離並降低在製品水準。本研究將群組技術導人晶圓廠工廠佈置，以HNPA+應用於晶圓製造廠。使用ProModel配合2^2*3*4之實驗設計建構48種不同的晶圓生產之系統模擬模式，評估模式之績效指標爲總流程時間、在製品水準、平均週期時間、晶圓運送總距離與各區間機台種類數的變異。模擬結果顯示導人群組技術並使用本研究所發展之HNPA+與原始方案、ROCA及HNPA三種方法比較，在整體績效上有較佳之表現。

關鍵字

群組技術 ； 單元形成法 ； 設施規劃 ； 晶圓製造

並列摘要

Facility planning affects the performance of wafer fab. Better fab layout leads to shorter wafer transportation distance and lower work-in-process (WIP) level. This research applies group technology (GT) techniques to the facility planning of wafer fab. Based on the experimental design of 2^2×3×4,we build ProModel simulation models to evaluate the performance of three different fab layouts generated from different GT cell formation algorithms. The performance indices are makespan, WIP level, average cycle time, wafer transportation distance, and the average and variance of number of types of equipment in cells. Simulation results show that an algorithm proposed in this research, HNPA+, outperforms the other algorithms (such as ROCA and HNPA) in most of the perform measure.

並列關鍵字

Group Technology ； Cell Formation ； Facility Planning ； Wafer Fab