- 期刊
混成材料(AMPS/SiO2)濕度感測器之製備與性能研究
Performance of a Humidity Sensor Prepared by the Hybrid Material of AMPS/SiO2
摘要
本研究嘗試使用一種有機與無機混成濕度感測材料來製作阻抗式濕度感測器，此一感測材料利用溶膠-凝膠程序將有機材料2-丙醯2-甲基丙烷磺酸與無機材料二氧化矽混成反應而得，之後再利用旋轉塗佈法將此感濕材料塗佈於印有一對梳型電極的氧化鋁基板製得所要的感測原件。混成材料所形成的互穿交錯網路結構具有可增強濕度感測器所需要的抗水性能及縮短偵測所需的反應時間等特性。經由阻抗分析儀測試後，於25℃及1kHz的條件下，感濕特性由25%RH至95%RH可達三個數量級以上；反應時間從95%RH變化至20%RH僅需10秒左右。此外，在溫度依數特性僅有0.23 RH℃^(-1) to 0.37RH℃^(-1)的影響（由15℃至55℃），遲滯量也在1.5%RH以下。
並列摘要
In this study, the impedance-type humidity sensor was prepared by using an organic-inorganic composite material and the performances were investigated. The 2-acrylamido-2-methyl-propane sulfonic acid(AMPS) was hybridized in the sol-gel process with silica gel(SiO2).This hybrid material was coated on the Al2O3 substrate with interdigited electrodes by using the spin coating method and was used as a sensing material. The interpenetrating polymer network(IPN)structure of the hybrid sensing film could increase the water-resistance and decrease the response time(10s from 95% to 20% RH)for this device. The impedance varied more than three orders of the magnitude in the range of 25～95% RH under 1kHz and 25℃condition. The temperature dependence is 0.23 RH℃^(-1) to 0.37 RH℃^(-1) for the temperature of 15℃ to 55℃, respectively, and the hysteresis is below 1.5% RH.