隔振基座動態特性測試與模擬分析

The Dynamic Characteristics Test and Simulation of Isolated Foundation

游培堯(Pei-Yao Yu) ； 黃宇中(Yu-Chung Huang) ； 陳家豪(Chia-Hao Chen) ； 陳維澤(Wei-Tse Chen) ； 鄭永彬(Yung-Pin Cheng)

《中華民國振動與噪音工程學會論文集》 2014 (2014/06) Pp. 301-305

摘要

本文主要針對隔振基座動態特性測試與模擬分析進行探討。隨著高科技產業進步，生產線機台愈來愈精密，對於隔振基座要求也逐年提高，微小的振動若導致生產線上機台無法運作或是良率不佳，皆會造成經營者巨大的損失。利用現場實地量測振動並且以有限元素法為基礎的模擬軟體進行模態分析都可以有效地瞭解基座本身的剛體及振動特性，進而找出振動問題並且解決。根據基座微振實測結果，從振動三合一圖中可以發現使用隔振基座來進行機台隔振，可以有效地使機台振動量符合VC振動規範。基座自然頻率與頻率響應測試結果，顯示基座第一模態的自然頻率為77 Hz，與使用有限元素（FEM）軟體ANSYS以及COSMOS的模擬結果79.9 Hz以及80.0 Hz相吻合。又發現ANSYS與COSMOS軟體各自分析的前三階模態自然頻率大致吻合，此結果也進一步的表示模擬結果的可靠性。

關鍵字

隔振基座 ； 動態特性 ； 模擬 ； 模態 ； 自然頻率

並列摘要

This research aimed at the dynamic characteristics test and simulation of isolated foundation. The precise manufacturing in semiconductor industry is highly demanded with the vibration criteria for both the factory floor and machine equipment. The rapid development and reducing time to market for the design of isolated foundation require more and more vibration behavior verification and simulation procedures in design stage. In this paper a straight forward solution is proposed for isolated foundation to find vibration behavior development which was capable of performing the measurements of vibration criteria and the simulation technique of vibration characteristics to fulfill the equipment specification. It shows in a good agreement of the first resonance mode results among three simulation and measurement approaches, and the results were found located at 77.0 Hz, 79.9 Hz and 80.0 Hz from the experimental model test, commercial finite element analysis software ANSYS, and COSMOS, respectively.

並列關鍵字

isolated foundation ； dynamic characteristics ； simulation ； mode ； nature frequency