XYθ三自由度微定位平台之結構設計與分析

本研究目的為設計一具有三自由度之奈米微定位平台，主要是以三組撓性鉸鏈放大機構所組成，進而達到X、Y、θ_z之運動，利用積層式壓電致動器為驅動元件，以及撓性鉸鍊無摩擦、無背隙、高位移解析度之特性，採用兩對稱槓桿機構、肘節放大機構及平行導引裝置設計，加強放大機構輸出點之剛性強度，再以正三角形方式擺置三組撓性鉸鏈放大機構，以達到X、Y軸直線運動與θ_z之旋轉運動，且具有高倍率放大位移輸出與較大的工作範圍。整體設計採用有限元素軟體ANSYS 12.0建立出奈米微定位平台的實體模型，來進行系統的靜、動態特性分析與模擬，進而瞭解其特性，結果表明本研究之微定位平台在X軸向有40.7 μm位移、Y軸向有35.4 μm位移、θ_z方向有294.5 are sec旋轉位移。

關鍵字

壓電制動器；撓性鉸鏈；精密定位平台

並列摘要

The primary purpose of this research is Structural design and analysis of micro-positioning XYθ platform with the flexible hinge，The mainly three groups of flexure hinge mechanism to enlarge the composition, and thus achieve X, Y, θ_z movement . This is the use of laminated piezoelectric actuator is driven element, and a flexible hinge without friction, backlash, features high resolution of displacement. Using two symmetrical lever mechanism, toggle mechanism enlarge and parallel guidance device is designed to enhance the strength of the rigid point of the output amplifying means, then three sets of flexible arrangements and an equilateral triangle way a hinge mechanism, to achieve X, Y-axis linear motion and θ_z rotational movement of, and has a high zoom magnification displacement output with larger operating range. Overall design uses a solid model finite element software ANSYS 12.0 to establish a micro-nanometer positioning platform for system static and dynamic characteristic analysis and simulation, and to understand their characteristics, Experiments were conducted to examine the performance of the stage, through this stage, X-axis translational motion stroke of 41.6 μm, Y-axis translational motion stroke of 40.7 μm and rotational motion stroke along Z-axis of 294.5 are sec can be achieved. In addition, FFT Analyzer is used as the experimental instrument to measure the resonance frequency of platform. The measure results are then verified with the analyzed results from modal analysis. It shows that the frequency response obtained from modal analysis by using ANSYS are close to the measured results from FFT Analyzer. so as to prevent resonance effect caused by dynamic behaviors of platform in measurement movement from causing measuring error. And understand the work platform the overall rigidity of the case from the results, make up the structural rigidity of the parts is more inadequate, then the spectrum analyzer for the measurement platform entity natural frequency can be drawn from the first natural resonant frequency of the system is about 349.8 Hz, and comparison analysis between the two, the difference is only in the amount of 5%.

並列關鍵字

Piezo actuator ； Flexural-hinge ； Nano-positioning stage

國際替代計量

XYθ三自由度微定位平台之結構設計與分析

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