自動化光學檢測應用於微放電線上補償技術研究

An AOI Technique for the On-line Compensation of Micro EDM

陳順同(Shun-Tong Chen) ； 楊弘意(Hong-Ye Yang) ； 康智凱(Zhi-Kai Kang)

《先進工程學刊》 6卷1期 (2011/01) Pp. 53-57

https://doi.org/10.29948/JAE.201101.0007

摘要

本研究整合機器視覺(Machine vision)與微製造技術(Micro fabrication technique)功能於同一部製造系統上，利用精密位移平台將線上加工完成的微細元件，以影像疊合技術對誤差量進行線上補償檢測，透過影像擷取、濾波、二值化、影像定位及影像比對的方式，計算工件影像和標準影像像素座標差值，即可得知補償值，經影像辨識計算後的補償量，系統會自動補償於原始加工程式的原點座標(G92)上進行再加工。主要目的使微小加工元件，在沒有任何移動、拆卸的情況下，直接進行影像比對與補償再加工，以提高微元件之幾何精度與尺寸精度，節省校正時間，並獲致線上微細加工、檢測與自動化補償之目的。透過上述所開發的補償技術，本研究成功應用於直徑30μm精密微球探針的製作。

關鍵字

機械視覺 ； 微製造技術 ； 線上補償技術 ； 光學檢測

並列摘要

This study combines ”machine vision” with ”micro fabrication technique” in a developed tabletop machine tool to construct a technique of on-line compensation and re-machining via sensing image information. A micro globular probe with 30 μm in diameter is designed and rough machined using micro electrical discharge machining from a micro rod made of tungsten carbide. Subsequently, it is cleaned on-line using the ultrasonic vibration-assisted in the designed cleaning tank. Image recognition which incorporates image capturing, binary, edge detecting and noise filtering as well as image superimposing is real-time carried out after rough machining to determine the values of error compensation and offset the coordinates of G92 command during finish machining. Experimental results show a high dimensional accuracy, geometry accuracy and excellent surface roughness can be obtained. The proposed approach is very cost-effective and can significantly contribute to the high precision on-line micro measurement industry.

並列關鍵字

machine vision ； micro fabrication technique ； on-line compensation ； optical Inspection