This paper discussed the effects of geometrical property and the contact surface characteristic on the test yield during the electric probe test of the wafer. It compared the influencing degree among various parameters (probe type, drive stroke and force, the angle of the probe in the test, pad material, and equipment stability), and proposed a better solution for a specific parameter and the corrective action for improvement. The electrical conduction during the probe test is transmitted into the chip through the probing pin of the probe card. Normally poor contact is the main factor leading to the instability of the whole test. The stress, reliability, and service life of the probe greatly affect the costs of the wafer test. The contact resistance of the probe increases gradually with the frequency of the probe test, which can lead to the degradation of the probe performance and thus further influence the service life of the probe.