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利用有限元素法於龍門機器人之靜態分析

A Finite Element Approach to Static Analysis of Gantry Robot

摘要


龍門機器人常用於面板業和半導體產業封裝後IC的壓合作業。在外引腳黏合設備的壓合過程中,壓合頭移動、加壓皆會造成振動與結構變形問題,危害IC電路腳位的正確連接。為了確保設備的高精度,並且作為改善機械設計的依據,本研究先建立外引腳黏合設備的模型,再匯入數值分析軟體ANSYS Workbench從事有限元素分析,模擬四個壓合頭在不同的位置時壓合之精度,執行靜態分析,計算各個部件變形量之數據和分佈,而且根據材料受力產生應變能的卡氏定理,本研究從事理論推導驗證模擬結果的正確性。

並列摘要


Gantry robots are commonly used in the bonding operation after IC packaging in panel industry and semiconductor industry. During the bonding process, bonder moving and bonding movement result in vibration and misalignment to IC pins. To ensure the bonding stability of gantry robots in high precision and as a basis to improve mechanical design, in this research, bonding models were first constructed and sent to ANSYS Workbench software to carry out the finite element analysis. Static structure simulation computed the deformation and precision from the components when four bonders moved to different positions. Moreover, in this study, based on Castigliano's theorem that deals with strain energy of materials subjected to forces, simulation results were verified by carrying out theory derivation.

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