利用化學氣相沉積法合成五氧化二釩奈米棒及性質分析鑑定之研究

Synthesis Characterization and Properties of V(subscript 2)O(subscript 5) Nanorods by Chemical Vapor Deposition Method

吳建璋(Chien-Chang Wu) ； 黃盟文(Meng-Wen Huang) ； 張立偉(Li-Wei Chang) ； 施漢章(Han C. Shih)

《華岡工程學報》 26期 (2010/06) Pp. 141-145

https://doi.org/10.29987/CCUHKJE.201006.0019

摘要

本研究利用化學氣相沉積法，已成功合成出五氧化二釩奈米棒，並其成長在矽基板上。由掃描式電子顯微鏡顯示出在高溫區五氧化二釩奈米棒直徑約為1-4μm，長度在數十個μm之間，在低溫區五氧化二釩奈米棒直徑約為100-300nm，長度在數十個μm之間。穿透式電子顯微鏡確認五氧化二釩奈米棒為斜方晶系結構，且是朝[110]的方向成長。X光繞射儀顯示出（001）與（002）為五氧化二釩主要之繞射面。X射線光電子光譜（XPS）之束縛能顯示出在517 eV、524.5 eV 與530 eV 分別為V2p(下標 3/2)、V2p(下標 1/2)與O1s軌域，證實了合成之奈米棒成分為五氧化二釩之組成成分。

關鍵字

化學氣相沉積法 ； 奈米棒 ； 五氧化二釩

並列摘要

In this work, the V(subscript 2)O(subscript 5) nanorods have been successfully synthesized on the Si substrates using chemical vapor deposition. The morphology was analyzed by field emission scanning electron microscope (FESEM). The size of the V(subscript 2)O(subscript 5) nanorods depends on the temperature region of the quartz tube furnace, that is, at higher temperature, the diameters and lengths are 1-4μm and several μms, respectively, while at lower temperature, they become 100-300 nm and several μms again. High resolution transmission electron microscopy (HRTEM) showed that the structure of V(subscript 2)O(subscript 5) nanorods are orthorhombic with the growth direction of [110]. X-ray diffraction (XRD) indicated that the (001) and (002) are the major diffraction planes of V2O5 nanorods. X-ray photoelectron spectroscopy (XPS) indicated that the binding energies are 517eV (V2p(subscript 3/2)), 524.5eV (V2p(subscript 1/2)) and 530eV (O1s), and confirmed that the composition of vanadium in the +5 oxidation state.

並列關鍵字

CVD ； nanorods ； V(subscript 2)O(subscript 5)