矽異質接面太陽電池之發展、研製與未來展望

Development, Fabrication and Prospect of Silicon Heterojunction Solar Cells

吳秉叡(Bing-Rui Wu) ； 連水養(Shui-Yang Lien) ； 武東星(Dong-Sing Wuu)

《光學工程》 100期 (2007/12) Pp. 38-46

https://doi.org/10.30011/OE.200712.0006

摘要

矽異質接面太陽電池因兼具了低溫製程與高轉換效率的特性而受矚目。本實驗室研究使用熱燈絲化學氣相沉積技術製作矽異質太陽電池，經由HWCVD製程參數對於矽晶薄膜結構的影響。並藉由雜質摻雜沈積n型及p型矽膜探討其矽膜光學，結構及電氣特性。目前已實現16.4%轉換效率，並持續改善矽膜特性以及降低元件內缺陷，未來將可更進一步提升效率。

關鍵字

矽異質接面太陽電池 ； 熱燈絲化學氣相沈積 ； 微晶矽 ； 結晶矽

並列摘要

In view of the advantages of low temperature process and high efficiency possibility, the microcrystalline silicon (mc-Si)/crystalline silicon (c-Si) heterojunction (HJ) solar cells have been studied. In this work, mc-Si/c-Si heterojunction solar cells were prepared using hot-wire chemical vapor deposition (HWCVD). Details of the HWCVD parameters effects on the structure, electrical and optical properties of the undoped and doped Si films were systematically studied. Finally, a solar cell structure consisting of Ag grid/ITO/n-nc-Si/textured p-c-Si/Al was obtained and conversion efficiency of 16.4% have been achieved. These are very encouraging results for future fabrication of high efficiency Si HJ solar cells.

並列關鍵字

Silicon heterojunction solar cell ； Hot-wire chemical vapor deposition, microcrystalline silicon ； crystalline silicon