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奈米壓印術在表面電漿感測陣列之應用

The Application of Nanoimprint Technology for Surface Plasmon Biosensing Arrays

摘要


表面電漿生物感測器提供了免標定與高的表面靈敏度,但如何降低其製作成本、高通量與提升靈敏度為目前大家所追逐的目標。本文介紹利用電子束微影與奈米壓印製作奈米金夾縫結構,利用此結構中的表面電漿共振作用應用於微陣列量測上。實驗發現縮小奈米夾縫寬度可大幅提高靈敏度,對anti-BSA的偵測極限約為35pM。

並列摘要


Surface plasmon biosensors provide label-free and sensitive bio-detections. However, how to achieve a biochip with low-cost, high-throughput and ultra-sensitivity is an important issue. We introduce the fabrication of nanoslit arrays by using electron-beam lithography and nanoimprint technology. The surface plasmon resonances in gold nanoslits are applied for microarray detections. The experimental results show the sensitivity is greatly enhanced by reducing the slit width. The detection limit for anti-BSA protein is up to 35pM.

被引用紀錄


劉育憲(2011)。聚亞醯胺-奈米金複合光學薄膜之製備及其微影製程技術〔碩士論文,淡江大學〕。華藝線上圖書館。https://doi.org/10.6846/TKU.2011.00472
林裕翔(2007)。二維及三維奈米球微影術 在光電元件與感測器上之應用〔碩士論文,國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2007.03231

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