摘要
本文描述研發新的雷射干涉系統，其根據三項設計準則：一、雙頻準則，二、避頻率混頻及偏振態交連準則，三、完美對稱準則。這樣的設計，可提升系統的雜訊免疫能力及系統的穩定度，並可消除週期性非線性誤差。整體系統是使用一單頻之穩頻氦氖雷射為光源，經由一移頻裝置將單頻光源分成一對帶有不同頻率，但其他特性完全相同之不重疊光源。此對空間不重疊光源並經由單模極化保持光纖引至干涉單元，而干涉單元是採用完全對稱準則。如此之系統符合前述之三項準則，並可作為量測線性位移、俯、仰、偏、擺及直線度之平台。本雷射干涉系統完成後得到如下之成果： 1)週期性非線性誤差低於30皮米(pm)，2)位移雜訊可低於2 pm/ÖHz。此系統是奈米量測之基礎平台。
並列摘要
This paper presents the development of a laser interferometric system based on three design principles, the heterodyne frequency, the avoiding mixing, and the perfect symmetry. These design principles give rise to the interferometer a highly stable system with, in principle, no periodic nonlinearity.The arrangement of the interferometer employs a single frequency stabilized He-Ne laser as the light source, a frequency-shifted means for converting the single laser beam into a pair of spatial-separated beams having the same optical properties but different optical frequencies, a pair of single polarization maintained fibers for delivering the heterodyne beams to the site for getting interference. The interferometric units are designed symmetrically. In addition to the spatial-separated beams with different frequencies, the system is compliant with the three design principles and may be developed as a plate-form to perform the measurements of displacement, pitch, yaw, and straightness of a rigid body.The developed interferometric system has the following specialties: 1) less than 30 pm in periodic nonlinearity, 2) displacement noise level as low as 2 pm/√Hz. It is the plate-form of interferometric systems for nanometrology.