微機電技術於航太科技之應用

Application of MEMS Technology in Aviation Science

張政仁(Jeng-Ren Chang) ； 游義地

《南臺灣資訊科技與應用研討會》 2007年 (2007/05) Pp. 428-431

https://doi.org/10.29684/NANTAIWANZ.200705.0428

摘要

利用微機電技術所製造之微元件因具有體積小、響頻高、靈敏度高、重量輕及多陣列等優點，使得近年來微機電系統技術蓬勃的發展，應用該技術製作之微感測器、微致動器等也逐漸被廣泛應用。
本研究旨為利用微機電製程技術製作微剪應力感測器及可撓式微泡致動器，並將其運用在飛行控制上。微剪應力感測器是以白金薄膜作為感測器，因白金的電阻值與溫度呈現良好的線性關係，當流體流經感測器時會帶走部分的熱量而使得感測器的電阻值發生變化，進而影響感測器兩端輸出的電壓值，藉由量測兩端的電壓值變化情形，可進一步得知流場的速度或剪應力；在可撓式微泡致動器的製作方面，首先將矽晶圓以乾式及濕式蝕刻方法製作成致動器母模，再利用此母模來製作可撓式微泡致動器，並利用旋轉塗佈的轉速來控制微泡致動器薄膜的厚度，此種製造方法可以精準的控制薄膜厚度及良好的均勻度。
在應用方面，研究的結果顯示可撓式微泡致動器裝置於錐形彈體的前表面，當彈體位於中高攻角狀態時，微泡致動器在適當位置致動可有效減輕彈體的側向力。

關鍵字

微機電系統 ； 微剪應力感測器 ； 可撓性微泡致動器

並列摘要

In recent years, Micro-Electro-Mechnaical system (MEMS) technology has developed rapidly because it possess many advantages, such as small volume, fast response, high sensitivity, light weight, multiple arrays and etc. The micro sensor and the micro actuator using MEMS technology are gradually applied in many fields.
The purposes of this study are that manufacture the micro shear stress sensor and the flexible micro balloon actuator using micro fabricated process, then apply them in flight control. The sensor part of micro shear stress sensor is made of platinum because it has excellent linear relation with temperature. In fabrication of flexible micro balloon actuator, experiments first fabricated the mother mold of flexible micro balloon actuator, then utilized this mother mold to manufacture flexible micro balloon actuator. The membrane thickness of flexible micro balloon actuator can be precisely controlled by utilizing the rotational rate of the spin coater. The experimental results also display the membranes thickness of flexible micro balloon actuators have excellent uniformity. Because all parts of micro balloon actuator are flexible, it can be packaged easily on the curve surface.
In application of flexible micro balloon actuator, we packaged flexible balloon actuators on the forebody of the cone-cylinder. From the wind tunnel experiments, the results demonstrated the cone-cylinder's side force can be effectively alleviated once flexible micro balloon actuators were actuated at some locations when the cone-cylinder was at moderate to high angle of attack.

並列關鍵字

Micro-Electro-Mechnaical system ； micro shear stress sensor ； flexible micro balloon actuator